@inproceedings{09cd2c5bca8b4e13831e10b1d3d46326,
title = "A monolithic CMOS/MEMS accelerometer with zero-g calibration readout circuit",
abstract = "A monolithic accelerometer design with zero-g calibration with TSMC 0.18 μm mixed-signal 1P6M process is presented. On-chip digital offset calibration enables compensation of random mechanical offset in the sensor due to process variation. The maximum 21 fF capacitance mismatch can be calibrated. The simulation results show that the whole system have 452.1 mV/g sensitivity. The power consumption is about 1.16 mW. The output noise is 26.85 μg/√Hz at 1KHz.",
keywords = "Accelerometer capacitive readout, Offset calibration, Readout circuit, Zero-g calibration",
author = "Liu, {Yu Sian} and Huang, {Chien Jo} and Kuo, {Fu Yen} and Kuei-Ann Wen and Fan, {Long Sheng}",
year = "2013",
month = dec,
day = "4",
doi = "10.1109/EUROCON.2013.6625271",
language = "English",
isbn = "9781467322324",
series = "IEEE EuroCon 2013",
pages = "2106--2110",
booktitle = "IEEE EuroCon 2013",
note = "null ; Conference date: 01-07-2013 Through 04-07-2013",
}