A Monolithic CMOS-MEMS Reconfigurable/Tunable Capacitive Accelerometer with Integrated Sensing Circuits

Yi Chiu*, Cheng Yen Lin, Hao Chiao Hong

*此作品的通信作者

研究成果: Article同行評審

7 引文 斯高帕斯(Scopus)

摘要

MEMS accelerometers have been widely used in various applications with a wide range of signal levels and bandwidth. Therefore it is desired to have a sensor whose characteristics such as sensitivity and bandwidth can be reconfigured/tuned depending on specific applications. This paper presents a reconfigurable/tunable z-axis accelerometer whose mechanical resonant frequency, sensitivity and sensing bandwidth can be tuned by the electrostatic spring softening effect. The proposed accelerometer was designed using a commercial 0.35 μm CMOS foundry service. The tuning electrodes were implemented in the metal and polysilicon layers in the standard CMOS process. An on-chip chopper stabilized readout circuit was designed to convert the capacitance signal to a voltage readout. The sensing structure was released by post-CMOS wet metal etching. Measurement results showed the proposed accelerometer had a sensitivity of 12 mV/g in the range of 0–5 g. The sensitivity and bandwidth tuning ranges are 50% and 18%, respectively, for an applied tuning voltage of 25 V. The demonstrated device is the first reconfigurable/tunable CMOS-MEMS accelerometer in the literature to our best knowledge.

原文English
文章編號876714
期刊Frontiers in Mechanical Engineering
8
DOIs
出版狀態Published - 12 5月 2022

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