TY - GEN
T1 - A Low-Power Sensing System of VEGF Concentration with Monolithic Electrodes and An All-Digital Sub-Sampling Delay-Locked Loop
AU - Sun, Tsung Wen
AU - Cheng, Ren Wei
AU - Tsai, Tsung Heng
N1 - Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - The CMOS MEMS capacitive transducer is integrated on the same chip for the point-of-care (PoC) applications. A low-noise sensing system using the sub-sampling technique to suppress the interface noise is presented. The biomarker is vascular endothelial growth factor (VEGF). The proposed sensing system converts the capacitance variations caused by the VEGF concentration at the transducer into digital codes with a low-power SAR-assisted time-to-digital converter (TDC). CMOS MEMS interdigitated electrodes are adopted as the transducer. Post-process etching and Au plating are applied on the surface of the electrodes. Experimental results show that a capacitive resolution of 28.3 fF and a sensing range of VEGF concentration from 1 to 1000 pg/ml are achieved. The power consumption of the sensing front-end is 18 μW and overall sensing system is merely 60.65 μW. The FOM of the proposed low-power VEGF sensing system is 587.8 pJ/conv.-step.
AB - The CMOS MEMS capacitive transducer is integrated on the same chip for the point-of-care (PoC) applications. A low-noise sensing system using the sub-sampling technique to suppress the interface noise is presented. The biomarker is vascular endothelial growth factor (VEGF). The proposed sensing system converts the capacitance variations caused by the VEGF concentration at the transducer into digital codes with a low-power SAR-assisted time-to-digital converter (TDC). CMOS MEMS interdigitated electrodes are adopted as the transducer. Post-process etching and Au plating are applied on the surface of the electrodes. Experimental results show that a capacitive resolution of 28.3 fF and a sensing range of VEGF concentration from 1 to 1000 pg/ml are achieved. The power consumption of the sensing front-end is 18 μW and overall sensing system is merely 60.65 μW. The FOM of the proposed low-power VEGF sensing system is 587.8 pJ/conv.-step.
KW - Cancer Diagnosis
KW - Capacitive transducer
KW - Delay lock loop (DLL)
KW - Gold Interdigitated electrode
KW - Time-to-digital converter (TDC)
KW - Vascular Endothelial Growth Factor (VEGF)
UR - http://www.scopus.com/inward/record.url?scp=85142922133&partnerID=8YFLogxK
U2 - 10.1109/BioCAS54905.2022.9948620
DO - 10.1109/BioCAS54905.2022.9948620
M3 - Conference contribution
AN - SCOPUS:85142922133
T3 - BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference: Intelligent Biomedical Systems for a Better Future, Proceedings
SP - 331
EP - 334
BT - BioCAS 2022 - IEEE Biomedical Circuits and Systems Conference
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2022 IEEE Biomedical Circuits and Systems Conference, BioCAS 2022
Y2 - 13 October 2022 through 15 October 2022
ER -
