A generalized foundry CMOS platform for capacitively-transduced resonators monolithically integrated with amplifiers

Wen Chien Chen*, Che Sheng Chen, Kuei-Ann Wen, Long Sheng Fan, Weileun Fang, Sheng Shian Li

*此作品的通信作者

    研究成果: Conference contribution同行評審

    16 引文 斯高帕斯(Scopus)

    摘要

    A generalized foundry CMOS-MEMS platform suited for integrated micromechanical resonator circuits have been developed for commercial multi-user purpose and demonstrated with a fast turnaround time and a variety of design flexibilities for resonator applications. With this platform, different configurations of capacitively-transduced resonators monolithically integrated with their associated amplifier circuits, spanning frequencies from 500kHz to 14.5MHz, have been realized with resonator Q's around 2,000. This platform specifically featured with various configurations of structural materials, different arrangements of mechanical boundary conditions, large transduction area, well-defined anchors, and performance enhancement scaling with IC fabrication technology, offers a variety of flexible design options suited for sensor and RF applications.

    原文English
    主出版物標題MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
    頁面204-207
    頁數4
    DOIs
    出版狀態Published - 1 6月 2010
    事件23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
    持續時間: 24 1月 201028 1月 2010

    出版系列

    名字Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
    ISSN(列印)1084-6999

    Conference

    Conference23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
    國家/地區China
    城市Hong Kong
    期間24/01/1028/01/10

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