@article{fd263597b35741dfb315fb1cd1469d06,
title = "A gasket-type standard leak element using femtosecond laser micromachining",
abstract = "A gasket-type standard leak element with a microfluidic channel was developed and measured. The microfluidic channel with a diameter of several micrometers and a length of one hundred micrometers was fabricated by using femtosecond laser micromachining. The conductances (",
keywords = "Leak element, Femtosecond laser ablation, Molecular flow conductance, Microfluidic, IN-SITU CALIBRATION, IONIZATION GAUGES, SENSITIVITIES, HOLES",
author = "Chi-Hin Chan and Chien-Ming Tu and Yeh, {S. D.} and Chang, {C. C.} and Lin, {T. C.} and Chih-Wei Luo and Ching-Shiang Hwang",
year = "2020",
month = oct,
doi = "10.1016/j.vacuum.2020.109650",
language = "English",
volume = "180",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier Limited",
}