A gasket-type standard leak element using femtosecond laser micromachining

Chi-Hin Chan*, Chien-Ming Tu, S. D. Yeh, C. C. Chang, T. C. Lin, Chih-Wei Luo, Ching-Shiang Hwang

*此作品的通信作者

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

摘要

A gasket-type standard leak element with a microfluidic channel was developed and measured. The microfluidic channel with a diameter of several micrometers and a length of one hundred micrometers was fabricated by using femtosecond laser micromachining. The conductances (

原文English
文章編號109650
頁數6
期刊Vacuum
180
DOIs
出版狀態Published - 十月 2020

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