@inproceedings{50e16a5277c54929abd16959edafa82a,
title = "A decouple structured gyroscope with integrated readout circuit on standard 0.18jim 1P6M CMOS Technolo",
abstract = "A dual proof-mass structured gyroscope integrated with readout circuit have been proposed. The C to V stage is achieved by the differential difference amplifier (DDA) which has advantages of high gain, low temperature and process dependence. Chopper Stabilization (CHS) and Corrected Double Sampling (CDS) Ls used to suppress low-frequency noise and compensate DC offset. The gain of DDA is 25dB and power consumption of total readout circuit is 791μW. The mems part is fabricated with standard 1P6M 0.18um CMOS process and the mechanical sensitivity is 11.26aF/°/s. Chip area is 1.9xl.7mm2.",
keywords = "Capacithe sensing, CMOS-MEMS, Gyroscope, Readout circuit",
author = "Chien, {Chun Lin} and Kuei-Ann Wen",
year = "2016",
month = dec,
day = "27",
doi = "10.1109/ISOCC.2016.7799718",
language = "English",
series = "ISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "15--16",
booktitle = "ISOCC 2016 - International SoC Design Conference",
address = "United States",
note = "null ; Conference date: 23-10-2016 Through 26-10-2016",
}