A comprehensive study of Ge1-xSix on Ge for the Ge nMOSFETs with tensile stress, shallow junctions and reduced leakage
- Guang Li Luo*
- , Shih Chiang Huang
- , Cheng Ting Chung
- , Dawei Heh
- , Chao-Hsin Chien
- , Chao Ching Cheng
- , Yao Jen Lee
- , Wen Fa Wu
- , Chiung Chih Hsu
- , Mei Ling Kuo
- , Jay Yi Yao
- , Mao Nan Chang
- , Chee Wee Liu
- , Chen-Ming Hu
- , Chun Yen Chang
- , Fu Liang Yang
*此作品的通信作者
研究成果: Conference contribution › 同行評審
3
引文
斯高帕斯（Scopus）