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A 65nm Node Strained SOI Technology with Slim Spacer

  • Fu Liang Yang*
  • , Chien Chao Huang
  • , Hou Yu Chen
  • , Jhon Jhy Liaw
  • , Tang Xuan Chung
  • , Hung Wei Chen
  • , Chang Yun Chang
  • , Cheng Chuan Huang
  • , Kuang Hsin Chen
  • , Di Hong Lee
  • , Hsun Chih Tsao
  • , Cheng Kuo Wen
  • , Shui Ming Cheng
  • , Yi Ming Sheu
  • , Ke Wei Su
  • , Chi Chun Chen
  • , Tze Liang Lee
  • , Shih Chang Chen
  • , Chih Jian Chen
  • , Cheng Hung Chang
    • Jhi Cheng Lu, Weng Chang, Chuan Ping Hou, Ying Ho Chen, Kuei Shun Chen, Ming Lu, Li Wei Kung, Yu Jun Chou, Fu Jye Liang, Jan Wen You, King Chang Shu, Bin Chang Chang, Jaw Jung Shin, Chun Kuang Chen, Tsai Sheng Gau, Bor Wen Chan, Yi Chun Huang, Han Jan Tao, Jyh Huei Chen, Yung Shun Chen, Yee Chia Yeo, Samuel K.H. Fung, Carlos H. Diaz, Chii Ming M. Wu, Burn J. Lin, Mong Song Liang, Jack Y.C. Sun, Chen-Ming Hu
*此作品的通信作者

研究成果: Conference article › 同行評審

14 引文 斯高帕斯（Scopus）

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Engineering

Material Science