A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring

Kelvin Yi Tse Lai; Yu Tao Yang; Bang Jing Chen; Chun Jen Shen; Ming Feng Shiu; Zih Cheng He; Hsie Chia Chang; Chen Yi Lee

doi:10.1109/ASSCC.2014.7008918

A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring

Kelvin Yi Tse Lai, Yu Tao Yang, Bang Jing Chen, Chun Jen Shen, Ming Feng Shiu, Zih Cheng He, Hsie Chia Chang, Chen Yi Lee

電子研究所

研究成果: Conference contribution › 同行評審

6 引文斯高帕斯（Scopus）

摘要

An event-driven and energy-efficient humidity sensor for environment detection and healthcare monitoring is presented. A differential CMOS-MEMS humidity device and proportion-based capacitance-to-digit readout circuit are proposed to overcome PVT variations, and in the meantime to improve sensitivity, response time, and conversion energy. This chip achieves 15.6b 20-90 %RH at 1KS/s, 6.1pJ per 0.02%RH of sensitivity, and 10ms fast response time in TSMC 0.35-μm CMOS MEMS process. With variations in temperature and voltage, our proposal can minimize the errors from 40%RH to 0.2%RH and 50%RH to 0.1%RH, making it very suitable for wearable respiratory monitoring.

原文	English
主出版物標題	2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers
發行者	Institute of Electrical and Electronics Engineers Inc.
頁面	293-296
頁數	4
ISBN（電子）	9781479940905
DOIs	https://doi.org/10.1109/ASSCC.2014.7008918
出版狀態	Published - 13 1月 2015
事件	2014 10th IEEE Asian Solid-State Circuits Conference, A-SSCC 2014 - Kaohsiung, Taiwan 持續時間: 10 11月 2014 → 12 11月 2014

出版系列

名字	2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers

Conference

Conference	2014 10th IEEE Asian Solid-State Circuits Conference, A-SSCC 2014
國家/地區	Taiwan
城市	Kaohsiung
期間	10/11/14 → 12/11/14

存取文件

10.1109/ASSCC.2014.7008918

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Link to publication in Scopus

引用此

Lai, K. Y. T., Yang, Y. T., Chen, B. J., Shen, C. J., Shiu, M. F., He, Z. C., Chang, H. C., & Lee, C. Y. (2015). A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring. 於 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers (頁 293-296). Article 7008918 (2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ASSCC.2014.7008918

Lai, Kelvin Yi Tse ; Yang, Yu Tao ; Chen, Bang Jing 等. / A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring. 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2015. 頁 293-296 (2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers).

@inproceedings{32ea249c19a547c5baa31bd02f4fa6f7,

title = "A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring",

abstract = "An event-driven and energy-efficient humidity sensor for environment detection and healthcare monitoring is presented. A differential CMOS-MEMS humidity device and proportion-based capacitance-to-digit readout circuit are proposed to overcome PVT variations, and in the meantime to improve sensitivity, response time, and conversion energy. This chip achieves 15.6b 20-90 %RH at 1KS/s, 6.1pJ per 0.02%RH of sensitivity, and 10ms fast response time in TSMC 0.35-μm CMOS MEMS process. With variations in temperature and voltage, our proposal can minimize the errors from 40%RH to 0.2%RH and 50%RH to 0.1%RH, making it very suitable for wearable respiratory monitoring.",

keywords = "Capacitive Sensing, Health-Care, Humidity Sensor, Low Energy, Low Power, Respiratory Monitoring",

author = "Lai, {Kelvin Yi Tse} and Yang, {Yu Tao} and Chen, {Bang Jing} and Shen, {Chun Jen} and Shiu, {Ming Feng} and He, {Zih Cheng} and Chang, {Hsie Chia} and Lee, {Chen Yi}",

year = "2015",

month = jan,

day = "13",

doi = "10.1109/ASSCC.2014.7008918",

language = "English",

series = "2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "293--296",

booktitle = "2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers",

address = "United States",

note = "2014 10th IEEE Asian Solid-State Circuits Conference, A-SSCC 2014 ; Conference date: 10-11-2014 Through 12-11-2014",

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Lai, KYT, Yang, YT, Chen, BJ, Shen, CJ, Shiu, MF, He, ZC, Chang, HC & Lee, CY 2015, A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring. 於 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers., 7008918, 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers, Institute of Electrical and Electronics Engineers Inc., 頁 293-296, 2014 10th IEEE Asian Solid-State Circuits Conference, A-SSCC 2014, Kaohsiung, Taiwan, 10/11/14. https://doi.org/10.1109/ASSCC.2014.7008918

A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring. / Lai, Kelvin Yi Tse; Yang, Yu Tao; Chen, Bang Jing 等.
2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2015. p. 293-296 7008918 (2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers).

研究成果: Conference contribution › 同行評審

TY - GEN

T1 - A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring

AU - Lai, Kelvin Yi Tse

AU - Yang, Yu Tao

AU - Chen, Bang Jing

AU - Shen, Chun Jen

AU - Shiu, Ming Feng

AU - He, Zih Cheng

AU - Chang, Hsie Chia

AU - Lee, Chen Yi

PY - 2015/1/13

Y1 - 2015/1/13

N2 - An event-driven and energy-efficient humidity sensor for environment detection and healthcare monitoring is presented. A differential CMOS-MEMS humidity device and proportion-based capacitance-to-digit readout circuit are proposed to overcome PVT variations, and in the meantime to improve sensitivity, response time, and conversion energy. This chip achieves 15.6b 20-90 %RH at 1KS/s, 6.1pJ per 0.02%RH of sensitivity, and 10ms fast response time in TSMC 0.35-μm CMOS MEMS process. With variations in temperature and voltage, our proposal can minimize the errors from 40%RH to 0.2%RH and 50%RH to 0.1%RH, making it very suitable for wearable respiratory monitoring.

AB - An event-driven and energy-efficient humidity sensor for environment detection and healthcare monitoring is presented. A differential CMOS-MEMS humidity device and proportion-based capacitance-to-digit readout circuit are proposed to overcome PVT variations, and in the meantime to improve sensitivity, response time, and conversion energy. This chip achieves 15.6b 20-90 %RH at 1KS/s, 6.1pJ per 0.02%RH of sensitivity, and 10ms fast response time in TSMC 0.35-μm CMOS MEMS process. With variations in temperature and voltage, our proposal can minimize the errors from 40%RH to 0.2%RH and 50%RH to 0.1%RH, making it very suitable for wearable respiratory monitoring.

KW - Capacitive Sensing

KW - Health-Care

KW - Humidity Sensor

KW - Low Energy

KW - Low Power

KW - Respiratory Monitoring

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U2 - 10.1109/ASSCC.2014.7008918

DO - 10.1109/ASSCC.2014.7008918

M3 - Conference contribution

AN - SCOPUS:84922567494

T3 - 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers

SP - 293

EP - 296

BT - 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2014 10th IEEE Asian Solid-State Circuits Conference, A-SSCC 2014

Y2 - 10 November 2014 through 12 November 2014

ER -

Lai KYT, Yang YT, Chen BJ, Shen CJ, Shiu MF, He ZC 等. A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring. 於 2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2015. p. 293-296. 7008918. (2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers). doi: 10.1109/ASSCC.2014.7008918

A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring

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Conference

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