3D-TCAD simulation study of the contact all around T-FinFET structure for 10nm metal-oxide-semiconductor field-effect transistor

Chen Han Chou, Chung Chun Hsu, Wen Kuan Yeh, Steve S. Chung, Chao-Hsin Chien*

*此作品的通信作者

研究成果: Conference contribution同行評審

3 引文 斯高帕斯(Scopus)

指紋

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Chemical Compounds

Engineering & Materials Science