3D Si-based nanochannel platform for robust cell electroporation

P. Bertani, L. Q. Chang, D. Gallego-Perez, V. Malkoc, L. J. Lee, W. Lu

研究成果: Conference contribution同行評審

1 引文 斯高帕斯(Scopus)


Electroporation is a cellular delivery method making use of a voltage pulse to propel exogenous material through the cell membrane and into the cell allowing the modification of a given cell or cell population. An ideal electroporation system would possess four characteristics encompassing the benefits of all these systems: (1) high throughput, (2) high cell viability, (3) excellent deliver efficiency, and (4) controlled dosage. Many advances1-2 in cell electroporation allow for high throughput, high cell viability, or excellent dosage control, yet no platform is available for the combination of all three. In this work, we show a "3D nanochannel electroporation (NEP) system" (Fig. 1a) on a silicon-chip platform designed to meet these three criteria. This "NEP chip" is patterned on one side using a ∼500 nm circle array and the other using a 50 μm array. Each pattern is then etched through until connection is established as shown in Fig. 1b. The etching of the 3D NEP chip is done using the Bosch process, a combination of SF6 and C4F8 plasma chemistries giving a highly directional etch for creation of high aspect ratio features. The result is a 3D nanochannel array consisting of nanopores that are ∼500 nm in diameter and 20-25 μm deep. The backside microchannel array consists of wells that are 50 μm in diameter and ∼225-230 μm deep.

主出版物標題73rd Annual Device Research Conference, DRC 2015
發行者Institute of Electrical and Electronics Engineers Inc.
出版狀態Published - 3 8月 2015
事件73rd Annual Device Research Conference, DRC 2015 - Columbus, United States
持續時間: 21 6月 201524 6月 2015


名字Device Research Conference - Conference Digest, DRC


Conference73rd Annual Device Research Conference, DRC 2015
國家/地區United States


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