3D integration of vertical-stacking of MoS2and Si CMOS featuring embedded 2T1R configuration demonstrated on full wafers

Chun-Jung Su*, M. K. Huang, K. S. Lee, V. P.H. Hu, Y. F. Huang, B. C. Zheng, C. H. Yao, N. C. Lin, K. H. Kao, T. C. Hong, P. J. Sung, C. T. Wu, T. Y. Yu, K. L. Lin, Yuan-Chieh Tseng, C. L. Lin, Y. J. Lee, Tien-Sheng Chao, J. Y. Li, W. F. WuJ. M. Shieh, Y. H. Wang, Wen-Kuan Yeh

*此作品的通信作者

研究成果: Conference contribution同行評審

2 引文 斯高帕斯(Scopus)

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Physics & Astronomy

Engineering & Materials Science

Chemical Compounds