@inproceedings{a9ecfa241ee649b9ae8d60412d0c6113,
title = "2D nanosphere lithography using surface plasmon-enhanced optical trapping",
abstract = "A two-dimensional (2D) surface plasmon (SP)-enhanced optical trapping system based on a single high numerical aperture objective has been developed. The system can be utilized to trap dielectric particles and simultaneously provide imaging. The 40-fold electric field enhancement, and hence strong 2D trapping force distribution with SP excitation through a gold film with a thickness of 45 nm in the near infrared region, was analyzed. The strong trapping force and high-resolution trapping image of nanoparticles can be concurrently achieved via the same high NA objective. The developed SP-enhanced trapping system was successfully applied to efficiently trap dielectric particles with a size down to 350 nm on a cover slip surface and allows for real-time imaging observation. Also, in order to further increase the penetration depth and the electric field of the evanescent wave, a coupled-waveguide surface plasmon resonance configuration consisting of a five-layer structure of Bk7/Au/SiO2/Au/H2O for two-dimensional optical trapping has been developed. Theoretical analysis shows that the maximum enhancement of the local electric field intensity is about 60-fold while the penetration depth is about 1 μm at the resonance angle. The trapped and aligned dielectric single layer particles were spread over a large area with a reduction in feature size to form a hexagonally close-packed (HCP) pattern on a cover slip surface. The HCP pattern has the potential for well-ordered 2D nanosphere lithography.",
keywords = "Nanosphere lithography, Optical trapping, Surface plasmons, Waveguides",
author = "Li, {Y. C.} and Lin, {C. Y.} and Chiu, {K. C.} and Cheang, {C. F.} and Chang, {Y. C.} and Chen, {S. J.}",
year = "2011",
doi = "10.1117/12.877129",
language = "English",
isbn = "9780819484642",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV",
note = "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV ; Conference date: 25-01-2011 Through 26-01-2011",
}