2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage

T. Chu Duc, Gih Keong Lau, J. Wei, P. M. Sarro

研究成果: Conference contribution同行評審

8 引文 斯高帕斯(Scopus)

摘要

This paper presents a novel 2D electro-thermal microgripper based on integrated silicon-polymer laterally stacked forward actuators. Displacements up to 8 and 13 μm along x-axis and y-axis at 2 V are measured. The microgripper is capable of rotating the clamped object both clockwise and counter-clockwise. Maximum average working temperature is 160°C.

原文English
主出版物標題Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
頁面687-690
頁數4
DOIs
出版狀態Published - 2007
事件20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, 日本
持續時間: 21 1月 200725 1月 2007

出版系列

名字Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(列印)1084-6999

Conference

Conference20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
國家/地區日本
城市Kobe
期間21/01/0725/01/07

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