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Article
Nanosheets
100%
Thin film transistors
84%
Polysilicon
76%
Nanosheet
54%
Degradation Rate
32%
Lin, J. Y. ,
Kuo, P. Y. ,
Lin, K. L. ,
Chin, C. C. &
Chao, T-S. ,
1 12月 2016 ,
於: IEEE Transactions on Electron Devices. 63 ,
12 ,
p. 4998-5003 6 p. , 7676340.
研究成果: Article › 同行評審
Nanowires
100%
Trimming
99%
Polysilicon
93%
Phosphoric Acid
75%
Phosphoric acid
75%
Yen, L. C. ,
Pan, T. M. ,
Lee, C. H. &
Chao, T-S. ,
1 7月 2016 ,
於: Sensors and Actuators, B: Chemical. 230 ,
p. 398-404 7 p. 研究成果: Article › 同行評審
Ferritin
100%
Nanowires
99%
Biosensors
98%
Polysilicon
93%
bioinstrumentation
88%
Gwo, S. ,
Yeh, C. L. ,
Chen, P. F. ,
Chou, Y. C. ,
Chen, T. T. ,
Chao, T-S. ,
Hu, S. F. &
Huang, T. Y. ,
1 12月 1999 ,
於: Applied Physics Letters. 74 ,
8 ,
p. 1090-1092 3 p. 研究成果: Article › 同行評審
titanium nitrides
100%
oxidation
60%
oxynitrides
49%
electric fields
48%
Auger spectroscopy
41%
Chen, B. H. ,
Lo, P. Y. ,
Wei, J. H. ,
Tsai, M. J. ,
Hwang, C. L. ,
Chao, T-S. ,
Lin, H-C. &
Huang, T. Y. ,
7 10月 2005 ,
於: Electrochemical and Solid-State Letters. 8 ,
10 研究成果: Article › 同行評審
Single-walled carbon nanotubes (SWCN)
100%
Cobalt
84%
Field effect transistors
77%
Field Effect
72%
cobalt
67%
Chen, J. H. ,
Lei, T. F. ,
Chao, T-S. ,
Su, T. P. ,
Huang, J. ,
Tuan, A. &
Chen, S. K. ,
13 4月 2000 ,
於: Electronics Letters. 36 ,
8 ,
p. 756-757 2 p. 研究成果: Article › 同行評審
Contact resistance
100%
Cleaning
81%
Vapors
77%
Dynamic random access storage
75%
Etching
23%
Tsai, T. I. ,
Chen, K. M. ,
Lin, H-C. ,
Lin, T. Y. ,
Su, C. J. ,
Chao, T-S. &
Huang, T. Y. ,
21 9月 2012 ,
於: IEEE Electron Device Letters. 33 ,
11 ,
p. 1565-1567 3 p. , 6302168.
研究成果: Article › 同行評審
Thin film transistors
100%
Polysilicon
90%
Drain Current
60%
Electric potential
40%
Drain current
33%
Lin, Y. H. ,
Chien, C-H. ,
Chou, T. H. ,
Chao, T-S. &
Lei, T. F. ,
1 3月 2007 ,
於: IEEE Transactions on Electron Devices. 54 ,
3 ,
p. 531-536 6 p. 研究成果: Article › 同行評審
Hafnium
100%
Hafnium Atom
75%
Flash memory
75%
Silicates
72%
Polysilicon
72%
Chen, Y. H. ,
Yen, L. C. ,
Chang, T. S. ,
Chiang, T. Y. ,
Kuo, P. Y. &
Chao, T-S. ,
7 8月 2013 ,
於: IEEE Electron Device Letters. 34 ,
8 ,
p. 1017-1019 3 p. , 6544264.
研究成果: Article › 同行評審
Thin film transistors
100%
Polysilicon
90%
Crystallization
85%
Tunneling
79%
Metals
50%
Su, C. J. ,
Tsai, T. I. ,
Lin, H-C. ,
Huang, T. Y. &
Chao, T-S. ,
24 7月 2012 ,
於: Nanoscale Research Letters. 7 ,
p. 1-14 14 p. 研究成果: Article › 同行評審
Nanowires
100%
Polysilicon
93%
Aluminum oxide
77%
Nanowire
69%
nanowires
64%
Ellipsometry
100%
Oxide films
73%
Oxides
50%
Refractive index
38%
Oxide
32%
Chao, T-S. ,
Liaw, M. C. ,
Chu, C. H. ,
Chang, C. Y. ,
Chien, C-H. ,
Hao, C. P. &
Lei, T. F. ,
16 9月 1996 ,
於: Applied Physics Letters. 69 ,
12 ,
p. 1781-1782 2 p. 研究成果: Article › 同行評審
metal oxide semiconductors
100%
boron
84%
penetration
80%
field effect transistors
76%
nitrogen
71%
Cho, T. C. ,
Lu, Y. L. ,
Yao, J. Y. ,
Lee, Y. J. ,
Sekar, K. ,
Tokoro, N. ,
Onoda, H. ,
Krull, W. ,
Current, M. I. &
Chao, T-S. ,
15 11月 2013 ,
於: ECS Journal of Solid State Science and Technology. 2 ,
7 研究成果: Article › 同行評審
Carbon clusters
100%
Phosphorus
60%
Annealing
49%
Microwaves
43%
Rapid thermal annealing
43%
Chiang, T. Y. ,
Ma, M. W. ,
Wu, Y. H. ,
Kuo, P. Y. ,
Wang, K. T. ,
Liao, C. C. ,
Yeh, C. R. &
Chao, T-S. ,
7 8月 2009 ,
於: IEEE Electron Device Letters. 30 ,
9 ,
p. 954-956 3 p. 研究成果: Article › 同行評審
Thin film transistors
100%
Dielectric Material
69%
Voltage
56%
Leakage Current
51%
Data storage equipment
47%
Transconductance
100%
Nitrides
78%
Polysilicon
74%
Nitride
62%
Compound Mobility
49%
Cleaning
100%
Vapors
95%
Oxides
91%
Silicon
84%
Compound Mobility
81%
Ellipsometry
100%
Amorphous silicon
80%
Amorphous Silicon
80%
Polysilicon
68%
Optical constants
53%
Chien, F. S. S. ,
Chang, J. W. ,
Lin, S. W. ,
Chou, Y. C. ,
Chen, T. T. ,
Gwo, S. ,
Chao, T-S. &
Hsieh, W. F. ,
17 1月 2000 ,
於: Applied Physics Letters. 76 ,
3 ,
p. 360-362 3 p. 研究成果: Article › 同行評審
microscopes
100%
oxidation
95%
etchants
80%
selectivity
61%
threshold voltage
61%
Chien, F. S. S. ,
Chou, Y. C. ,
Chen, T. T. ,
Hsieh, W. F. ,
Chao, T-S. &
Gwo, S. ,
15 2月 2001 ,
於: Journal of Applied Physics. 89 ,
4 ,
p. 2465-2472 8 p. 研究成果: Article › 同行評審
silicon nitrides
100%
microscopes
79%
oxidation
75%
kinetics
61%
etching
30%
Lu, Y. L. ,
Hsueh, F. K. ,
Huang, K. C. ,
Cheng, T. Y. ,
Kowalski, J. M. ,
Kowalski, J. E. ,
Lee, Y. J. ,
Chao, T-S. &
Wu, C. Y. ,
1 5月 2010 ,
於: IEEE Electron Device Letters. 31 ,
5 ,
p. 437-439 3 p. , 5427093.
研究成果: Article › 同行評審
Gates (transistor)
100%
Thin film transistors
89%
MOSFET devices
82%
Doping (additives)
78%
Chemical activation
63%
Lin, H-C. ,
Lee, D. Y. ,
Lee, C. Y. ,
Chao, T-S. ,
Huang, T. Y. &
Wang, T-H. ,
1 1月 2001 ,
於: International Symposium on VLSI Technology, Systems, and Applications, Proceedings. p. 37-40 4 p. 研究成果: Article › 同行評審
Oxides
100%
breakdown
90%
MOS devices
80%
Current voltage characteristics
77%
oxides
72%
Lin, Y. H. ,
Lai, C. S. ,
Lee, C. L. ,
Lei, T. F. &
Chao, T-S. ,
1 1月 1995 ,
於: IEEE Electron Device Letters. 16 ,
6 ,
p. 248-249 2 p. 研究成果: Article › 同行評審
Nitridation
100%
Polysilicon
74%
Boron
73%
Capacitor
66%
Boron Atom
56%
Shen, C. H. ,
Chen, W. Y. ,
Lee, S. Y. ,
Kuo, P. Y. &
Chao, T. S. ,
1 1月 2020 ,
於: IEEE Transactions on Nanotechnology. 19 ,
p. 322-327 6 p. , 9044627.
研究成果: Article › 同行評審
Nanowires
100%
Crystallinity
98%
Nitrides
97%
Polysilicon
93%
Field effect transistors
86%
Lin Hao, Y. ,
Lai, C. S. ,
Lee Lcn, C. ,
Lei, T. F. &
Chao, T-S. ,
1 12月 1996 ,
於: IEEE Transactions on Electron Devices. 43 ,
7 ,
p. 1161-1165 5 p. 研究成果: Article › 同行評審
Polysilicon
100%
Boron
98%
Fluorine
89%
Boron Atom
75%
Oxides
74%
Chen, J. H. ,
Lei, T. F. ,
Chen, C. L. ,
Chao, T-S. ,
Wen, Y. &
Chen, K. T. ,
1 1月 2002 ,
於: Journal of the Electrochemical Society. 149 ,
1 ,
p. G63-G69 8 p. 研究成果: Article › 同行評審
Nitrogen
100%
Vapors
96%
Leakage Current
94%
Oxides
92%
Charge Pumping
73%
Chen, J. H. ,
Lei, T. F. ,
Landheer, D. ,
Wu, X. ,
Ma, M. W. ,
Wu, W. C. ,
Yang, T. Y. &
Chao, T-S. ,
9 10月 2007 ,
於: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 46 ,
10 A ,
p. 6586-6588 3 p. 研究成果: Article › 同行評審
Nanocrystals
100%
Amorphous silicon
60%
nanocrystals
59%
Silicon
52%
amorphous silicon
41%
Wang, K. T. ,
Hsueh, F. C. ,
Lu, Y. L. ,
Chiang, T. Y. ,
Wu, Y. H. ,
Liao, C. C. ,
Yen, L. C. &
Chao, T-S. ,
10 5月 2012 ,
於: IEEE Electron Device Letters. 33 ,
6 ,
p. 839-841 3 p. , 6194261.
研究成果: Article › 同行評審
Thin film transistors
100%
Data storage equipment
47%
Voltage
28%
Computer programming
20%
Durability
15%
Yang, E. C. S. ,
Liu, C. J. ,
Liaw, M. C. ,
Chao, T-S. &
Hsu, C. C. H. ,
1 12月 1999 ,
於: IEEE Transactions on Electron Devices. 46 ,
6 ,
1 p. 研究成果: Article › 同行評審
Flash memory
100%
Tunneling
85%
Oxides
36%
Oxide
15%
Application
8%
Pan, T. M. ,
Lei, T. F. ,
Chen, C. C. ,
Chao, T-S. ,
Liaw, M. C. ,
Yang, W. L. ,
Tsai, M. S. ,
Lu, C. P. &
Chang, W. H. ,
1 7月 2000 ,
於: IEEE Electron Device Letters. 21 ,
7 ,
p. 338-340 3 p. 研究成果: Article › 同行評審
Ammonium hydroxide
100%
Chemical mechanical polishing
76%
Ammonium Hydroxide
69%
Polishing
68%
Polysilicon
68%
Wu, C. H. ,
Lee, T. M. ,
Sheu, J-T. &
Chao, T-S. ,
1 4月 2009 ,
於: Japanese Journal of Applied Physics. 48 ,
4 PART 2 , 04C133.
研究成果: Article › 同行評審
Self assembled monolayers
100%
Lithography
69%
lithography
53%
Scanning
49%
Chemical bonds
47%
Liu, S. H. ,
Yang, W. L. ,
Lin, Y. H. ,
Wu, C. C. &
Chao, T-S. ,
23 9月 2013 ,
於: IEEE Electron Device Letters. 34 ,
11 ,
p. 1388-1390 3 p. , 6603277.
研究成果: Article › 同行評審
Ion bombardment
100%
Ion Bombardment
81%
Doping (additives)
69%
Voltage
30%
Ion
24%
Chen, B. H. ,
Wet, J. H. ,
Lo, P. Y. ,
Pei, Z. W. ,
Chao, T-S. ,
Lin, H-C. &
Huang, T. Y. ,
25 4月 2006 ,
於: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 45 ,
4 B ,
p. 3680-3685 6 p. 研究成果: Article › 同行評審
Carbon nanotube field effect transistors
100%
Single-walled carbon nanotubes (SWCN)
92%
Carbon nanotubes
70%
carbon nanotubes
57%
field effect transistors
52%
Pan, T. M. ,
Lei, T. F. ,
Ko, F-H. ,
Chao, T-S. ,
Chiu, T. H. &
Lu, C. P. ,
1 8月 2004 ,
於: IEEE Transactions on Semiconductor Manufacturing. 17 ,
3 ,
p. 470-476 7 p. 研究成果: Article › 同行評審
cleaning
100%
Cleaning
94%
aqueous solutions
93%
Oxides
86%
Hydroxide
82%
Chang, S. J. ,
Chang, C. Y. ,
Chao, T-S. ,
Zhong, S. Z. ,
Yeh, W. K. &
Huang, T. Y. ,
1 8月 2000 ,
於: IEEE Electron Device Letters. 21 ,
8 ,
p. 381-383 3 p. 研究成果: Article › 同行評審
Fluorine
100%
MOSFET devices
84%
Boron
82%
Field Effect
71%
Implant
71%
Lu, Y. H. ,
Kuo, P. Y. ,
Wu, Y. H. ,
Chen, Y. H. &
Chao, T-S. ,
1 2月 2011 ,
於: IEEE Electron Device Letters. 32 ,
2 ,
p. 173-175 3 p. , 5671463.
研究成果: Article › 同行評審
Nanowires
100%
Polysilicon
93%
Nanowire
69%
Controllability
20%
Plasmas
18%
Wu, Y. H. ,
Kuo, P. Y. ,
Lu, Y. H. ,
Chen, Y. H. &
Chao, T-S. ,
1 11月 2010 ,
於: IEEE Electron Device Letters. 31 ,
11 ,
p. 1233-1235 3 p. , 5559329.
研究成果: Article › 同行評審
Thin film transistors
100%
Polysilicon
90%
Polycrystalline Solid
69%
Compound Mobility
39%
Field Effect
25%
Li, Y-M. ,
Lee, J. W. ,
Tang, T. W. ,
Chao, T. S. ,
Lei, T. F. &
Sze, S. M. ,
1 8月 2002 ,
於: Computer Physics Communications. 147 ,
1-2 ,
p. 214-217 4 p. 研究成果: Article › 同行評審
Gate dielectrics
100%
Oxide semiconductors
83%
metal oxide semiconductors
72%
capacitors
45%
Metals
45%
Pan, T. M. ,
Lei, T. F. ,
Chao, T-S. ,
Liaw, M. C. ,
Ko, F-H. &
Lu, C. P. ,
1 6月 2001 ,
於: Journal of the Electrochemical Society. 148 ,
6 研究成果: Article › 同行評審
Cleaning
100%
Oxides
91%
Ethylenediaminetetraacetic Acid
83%
Hydrogen Peroxide
82%
Electrical Property
59%
Wu, W. C. ,
Chao, T-S. ,
Peng, W. C. ,
Yang, W. L. ,
Chen, J. H. ,
Ma, M. W. ,
Lai, C. S. ,
Yang, T. Y. ,
Lee, C. H. ,
Hsieh, T. M. ,
Liou, J. C. ,
Chen, T. P. ,
Chen, C. H. ,
Lin, C. H. ,
Chen, H. H. &
Ko, J. ,
1 1月 2008 ,
於: Semiconductor Science and Technology. 23 ,
1 , 015004.
研究成果: Article › 同行評審
Silicon oxides
100%
Nitrides
83%
silicon oxides
72%
nitrides
64%
Electric Field
62%
Pan, T. M. ,
Lei, T. F. ,
Chao, T-S. ,
Liaw, M. C. &
Lu, C. P. ,
10月 2000 ,
於: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 39 ,
10 ,
p. 5805-5808 4 p. 研究成果: Article › 同行評審
cleaning
100%
Cleaning
94%
Oxides
86%
methodology
81%
oxides
62%
Ma, W. C. Y. ,
Chiang, T. Y. ,
Lin, J. W. &
Chao, T-S. ,
1 1月 2012 ,
於: IEEE/OSA Journal of Display Technology. 8 ,
1 ,
p. 12-17 6 p. , 6030887.
研究成果: Article › 同行評審
Thin film transistors
100%
Polysilicon
90%
Oxides
67%
transistors
62%
Trap Density Measurement
59%
Chen, W. H. ,
Chao, T-S. ,
Liu, Y. N. ,
Lei, T. F. &
Chou, K. S. ,
2 2月 1995 ,
於: Electronics Letters. 31 ,
3 ,
p. 239-241 3 p. 研究成果: Article › 同行評審
Surface defects
100%
Polysilicon
95%
Contamination
80%
Scanning electron microscopy
65%
Flow rate
62%
Wu, W. C. ,
Chao, T-S. ,
Chiu, T. H. ,
Wang, J. C. ,
Lai, C. S. ,
Ma, M. W. &
Lo, W. C. ,
23 6月 2008 ,
於: Electrochemical and Solid-State Letters. 11 ,
8 研究成果: Article › 同行評審
Gate dielectrics
100%
MOSFET devices
82%
Etching
75%
metal oxide semiconductors
72%
Field Effect
69%
Lo, W. C. ,
Kuo, Y. H. ,
Lee, Y. J. ,
Chao, T-S. &
Chang, C. Y. ,
7 9月 2007 ,
於: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 46 ,
9 A ,
p. 5715-5718 4 p. 研究成果: Article › 同行評審
MOSFET devices
100%
metal oxide semiconductors
87%
field effect transistors
67%
Interface states
65%
Substrates
60%
Pan, T. M. ,
Lei, T. F. ,
Ko, F-H. ,
Chao, T-S. ,
Liaw, M. C. ,
Lee, Y. H. &
Lud, C. P. ,
1 6月 2002 ,
於: Journal of the Electrochemical Society. 149 ,
6 研究成果: Article › 同行評審
Chemical mechanical polishing
100%
Polishing
88%
Polysilicon
88%
Cleaning
71%
Hydroxide
62%
Chen, J. H. ,
Huang, T. B. ,
Wu, X. ,
Landheer, D. ,
Lei, T. F. &
Chao, T-S. ,
1 1月 2007 ,
於: Journal of the Electrochemical Society. 154 ,
1 研究成果: Article › 同行評審
High-k dielectric
100%
Ion implantation
85%
Ion Implantation
77%
Nitrogen
58%
Plasmas
58%
n-type semiconductors
100%
MOSFET devices
92%
metal oxide semiconductors
80%
Nickel
73%
Nitrogen
73%
Chen, H. W. ,
Huang, T. Y. ,
Landheer, D. ,
Wu, X. ,
Moisa, S. ,
Sproule, G. I. &
Chao, T-S. ,
1 6月 2002 ,
於: Journal of the Electrochemical Society. 149 ,
6 研究成果: Article › 同行評審
Molecular oxygen
100%
Nonconductor
95%
Deposition rates
73%
Zirconium
71%
X ray photoelectron spectroscopy
69%
Wang, K. T. ,
Chao, T-S. ,
Chiang, T. Y. ,
Wu, W. C. ,
Kuo, P. Y. ,
Wu, Y. H. ,
Lu, Y. L. ,
Liao, C. C. ,
Yang, W. L. ,
Lee, C. H. ,
Hsieh, T. M. ,
Liou, J. C. ,
Wang, S. D. ,
Chen, T. P. ,
Chen, C. H. ,
Lin, C. H. &
Chen, H. H. ,
6 11月 2009 ,
於: IEEE Electron Device Letters. 30 ,
11 ,
p. 1206-1208 3 p. 研究成果: Article › 同行評審
Flash memory
100%
Electric fields
77%
Electric Field
75%
Hot electrons
41%
Charge injection
40%
Chen, C. C. ,
Lin, H-C. ,
Chang, C. Y. ,
Liang, M. S. ,
Chien, C-H. ,
Hsien, S. K. ,
Huang, T. Y. &
Chao, T-S. ,
1 7月 2000 ,
於: IEEE Transactions on Electron Devices. 47 ,
7 ,
p. 1355-1360 6 p. 研究成果: Article › 同行評審
Plasmas
100%
Oxides
93%
Oxide
58%
Leakage Current
47%
Leakage currents
38%