Po-Tsun Liu

2004

Memory effect of oxide/SiC:O/oxide sandwiched structures

Chang, T. C., Van, S. T., Yang, F. M., Liu, P-T. & Sze, S. M., 22 3月 2004, 於: Applied Physics Letters. 84, 12, p. 2094-2096 3 p.

研究成果: Article › 同行評審

5 引文斯高帕斯（Scopus）

Method to improve chemical-mechanical-planarization polishing rate of low-k methyl-silsesquiazane for ultralarge scale integrated interconnect application

Chang, T. C., Tsai, T. M., Liu, P-T., Yan, S. T., Chang, Y. C., Aoki, H., Sze, S. M. & Tseng, T-Y., 1 5月 2004, 於: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 3, p. 1196-1201 6 p.

研究成果: Article › 同行評審

Pattern Profile Distortion and Stress Evolution in Nanoporous Qrganosilicates after Photoresist Stripping

Liu, P-T., Chen, C. W., Chang, T. C. & Tseng, T-Y., 8 4月 2004, 於: Electrochemical and Solid-State Letters. 7, 2, p. F5-F7 3 p.

研究成果: Article › 同行評審

Quasisuperlattice storage: A concept of multilevel charge storage

Chang, T. C., Yan, S. T., Liu, P-T., Chen, C. W., Wu, H. H. & Sze, S. M., 12 7月 2004, 於: Applied Physics Letters. 85, 2, p. 248-250 3 p.

研究成果: Article › 同行評審

22 引文斯高帕斯（Scopus）

Quasi-superlattice storage: A concept of multilevel charge storage

Chang, T. C., Yan, S. T., Liu, P-T., Chen, C. W., Wu, H. H. & Sze, S. M., 1 12月 2004, 於: Journal of the Electrochemical Society. 151, 12, p. G805-G808 4 p.

研究成果: Article › 同行評審

3 引文斯高帕斯（Scopus）

Short-Channel Poly-Si Thin-Film Transistors with Ultrathin Channel and Self-Aligned Tungsten-Clad Source/Drain

Zan, H-W., Chang, T. C., Shih, P. S., Peng, D. Z., Kuo, P. Y., Huang, T. Y., Chang, C. Y. & Liu, P-T., 8 4月 2004, 於: Electrochemical and Solid-State Letters. 7, 2, p. G31-G33 3 p.

研究成果: Article › 同行評審

1 引文斯高帕斯（Scopus）

Structural characteristics and interfacial reactions of low dielectric constant porous polysilazane for Cu metallization

Wang, J. H., Liu, P-T., Chang, T. S., Chang, T. C. & Chen, L. J., 22 12月 2004, 於: Thin Solid Films. 469-470, SPEC. ISS., p. 393-397 5 p.

研究成果: Article › 同行評審

3 引文斯高帕斯（Scopus）

Study on etching profile of nanoporous silica

Chen, C. W., Chang, T. C., Liu, P-T., Tsai, T. M., Wu, H. H. & Tseng, T-Y., 22 12月 2004, 於: Thin Solid Films. 469-470, SPEC. ISS., p. 377-382 6 p.

研究成果: Article › 同行評審

Study on SONOS nonvolatile memory technology using high-density plasma CVD silicon nitride

Chang, T. C., Yan, S. T., Liu, P-T., Chen, C. W., Wu, Y. C. & Sze, S. M., 16 6月 2004, 於: Electrochemical and Solid-State Letters. 7, 6, p. G113-G115 3 p.

研究成果: Article › 同行評審

7 引文斯高帕斯（Scopus）

Study on the effect of electron beam curing on low-K porous organosilicate glass (OSG) material

Chang, T. C., Tsai, T. M., Liu, P-T., Chen, C. W. & Tseng, T-Y., 22 12月 2004, 於: Thin Solid Films. 469-470, SPEC. ISS., p. 383-387 5 p.

研究成果: Article › 同行評審

18 引文斯高帕斯（Scopus）

2003

A novel SiGe raised source/drain polycrystalline silicon thin-film transistor with improved on-current and larger breakdown voltage

Peng, D. Z., Chang, T. C., Liu, C. F., Yeh, P. H., Liu, P-T. & Chang, C. Y., 3月 2003, 於: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 42, 3, p. 1164-1167 4 p.

研究成果: Article › 同行評審

2 引文斯高帕斯（Scopus）

A study of parasitic resistance effects in thin-channel polycrystalline silicon TFTs with tungsten-clad source/drain

Zan, H-W., Chang, T. C., Shih, P. S., Peng, D. Z., Kuo, P. Y., Huang, T. Y., Chang, C. Y. & Liu, P-T., 1 8月 2003, 於: IEEE Electron Device Letters. 24, 8, p. 509-511 3 p.

研究成果: Article › 同行評審

11 引文斯高帕斯（Scopus）

Characteristics and stress-induced degradation of laser-activated low temperature polycrystalline silicon thin-film transistors

Peng, D. Z., Chang, T. C., Chang, C. Y., Tsai, M. L., Tu, C. H. & Liu, P-T., 15 2月 2003, 於: Journal of Applied Physics. 93, 4, p. 1926-1932 7 p.

研究成果: Article › 同行評審

2 引文斯高帕斯（Scopus）

Dielectric characteristics of low-permittivity silicate using electron beam direct patterning for intermetal dielectric applications

Liu, P-T., Chang, T. C., Tsai, T. M., Lin, Z. W., Chen, C. W., Chen, B. C. & Sze, S. M., 17 11月 2003, 於: Applied Physics Letters. 83, 20, p. 4226-4228 3 p.

研究成果: Article › 同行評審

11 引文斯高帕斯（Scopus）

Direct patterning of low-k hydrogen silsesquioxane using x-ray exposure technology

Chang, T. C., Tsai, T. M., Liu, P-T., Mor, Y. S., Chen, C. W., Sheu, J-T. & Tseng, T-Y., 1 5月 2003, 於: Electrochemical and Solid-State Letters. 6, 5

研究成果: Article › 同行評審

4 引文斯高帕斯（Scopus）

Electrical transport phenomena in aromatic hydrocarbon polymer

Liu, P-T., Chang, T. C., Yan, S. T., Li, C. H. & Sze, S. M., 1 2月 2003, 於: Journal of the Electrochemical Society. 150, 2

研究成果: Article › 同行評審

24 引文斯高帕斯（Scopus）

Moisture-induced material instability of porous organosilicate glass

Chang, T. C., Chen, C. W., Liu, P-T., Mor, Y. S., Tsai, H. M., Tsai, T. M., Yan, S. T., Tu, C. H., Tseng, T-Y. & Sze, S. M., 1 4月 2003, 於: Electrochemical and Solid-State Letters. 6, 4

研究成果: Article › 同行評審

13 引文斯高帕斯（Scopus）

Polycrystalline silicon thin-film transistor with self-aligned SiGe raised source/drain

Peng, D. Z., Chang, T. C., Shih, P. S., Zan, H-W., Huang, T. Y., Chang, C. Y. & Liu, P-T., 16 12月 2003, 於: Applied Physics Letters. 81, 25, p. 4763-4765 3 p.

研究成果: Article › 同行評審

19 引文斯高帕斯（Scopus）

Structural and electrical characteristics of low-dielectric constant porous hydrogen silsesquioxane for Cu metallization

Wang, J. H., Chen, W. J., Chang, T. C., Liu, P-T., Cheng, S. L., Lin, J. Y. & Chen, L. J., 1 8月 2003, 於: Journal of the Electrochemical Society. 150, 8, p. F141-F146 6 p.

研究成果: Article › 同行評審

15 引文斯高帕斯（Scopus）

2002

A W-spacer GOLD TFT with high performance and high reliability

Zan, H-W., Peng, D. Z., Shih, P. S., Chang, T. C., Liu, P-T. & Chang, C. Y., 26 9月 2002, 於: Vacuum. 67, 3-4, p. 595-598 4 p.

研究成果: Article › 同行評審

Characterization of porous silicate for ultra-low k dielectric application

Liu, P-T., Chang, T. C., Hsu, K. C., Tseng, T-Y., Chen, L. M., Wang, C. J. & Sze, S. M., 1 7月 2002, 於: Thin Solid Films. 414, 1, p. 1-6 6 p.

研究成果: Article › 同行評審

27 引文斯高帕斯（Scopus）

Effective strategy for porous organosilicate to suppress oxygen ashing damage

Liu, P-T., Chang, T. C., Mor, Y. S., Chen, C. W., Tsai, T. M., Chu, C. J., Pan, F-M. & Szea, S. M., 1 3月 2002, 於: Electrochemical and Solid-State Letters. 5, 3

研究成果: Article › 同行評審

25 引文斯高帕斯（Scopus）

Electrical properties of metal-ferroelectric-insulator-semiconductor using sol-gel derived SrBi₂Ta₂O₉ film and ultra-thin Si₃N₄ buffer layer

Huang, C. H., Tseng, T-Y., Chien, C-H., Yang, M. J., Leu, C. C., Chang, T. C., Liu, P-T. & Huang, T. Y., 2 12月 2002, 於: Thin Solid Films. 420-421, p. 377-381 5 p.

研究成果: Article › 同行評審

10 引文斯高帕斯（Scopus）

Metal-organic chemical vapor deposition of Nb_xTa_(1-x)N_yO_mC_n films as diffusion barriers for Cu metallization

Gau, W. C., Wu, C. W., Chang, T. C., Liu, P-T., Chu, C. J., Chen, C. H. & Chen, L. J., 2 12月 2002, 於: Thin Solid Films. 420-421, p. 548-552 5 p.

研究成果: Article › 同行評審

2 引文斯高帕斯（Scopus）

Preventing dielectric damage of low-k organic siloxane by passivation treatment

Chang, T. C., Mor, Y. S., Liu, P-T., Tsai, T. M., Chen, C. W., Mei, Y. J., Pan, F-M., Wu, W. F. & Sze, S. M., 4月 2002, 於: Microelectronic Engineering. 60, 3-4, p. 469-475 7 p.

研究成果: Article › 同行評審

10 引文斯高帕斯（Scopus）

Recovering dielectric loss of low dielectric constant organic siloxane during the photoresist removal process

Chang, T. C., Mor, Y. S., Liu, P-T., Tsai, T. M., Chen, C. W., Mei, Y. J. & Sze, S. M., 1 8月 2002, 於: Journal of the Electrochemical Society. 149, 8

研究成果: Article › 同行評審

46 引文斯高帕斯（Scopus）

Reliability of laser-activated low-temperature polycrystalline silicon thin-film transistors

Peng, D. Z., Chang, T. C., Zan, H-W., Huang, T. Y., Chang, C. Y. & Liu, P-T., 24 6月 2002, 於: Applied Physics Letters. 80, 25, p. 4780-4782 3 p.

研究成果: Article › 同行評審

7 引文斯高帕斯（Scopus）

The novel pattern method of low-k hybrid-organic-siloxane-polymer film using X-ray exposure

Chang, T. C., Tsai, T. M., Liu, P-T., Mor, Y. S., Chen, C. W., Mei, Y. J., Sheu, J-T. & Tseng, T-Y., 2 12月 2002, 於: Thin Solid Films. 420-421, p. 403-407 5 p.

研究成果: Article › 同行評審

12 引文斯高帕斯（Scopus）

Trimethylchlorosilane treatment of ultralow dielectric constant material after photoresist removal processing

Chang, T. C., Mor, Y. S., Liu, P-T., Tsai, T. M., Chen, C. W., Chu, C. J., Pan, F-M., Lur, W. & Szeb, S. M., 1 10月 2002, 於: Journal of the Electrochemical Society. 149, 10

研究成果: Article › 同行評審

25 引文斯高帕斯（Scopus）

2001

Effectiveness of NH₃ plasma treatment in preventing wet stripper damage to low-k hydrogen silsesquioxane (HSQ)

Chang, T., Mor, Y. S., Liu, P-T., Tsai, T. M., Chen, C. W., Mei, Y. J. & Sze, S. M., 1 12月 2001, 於: Japanese Journal of Applied Physics, Part 2: Letters. 40, 12 A, p. L1311-L1313

研究成果: Article › 同行評審

2 引文斯高帕斯（Scopus）

Elimination of dielectric degradation for chemical-mechanical planarization of low-k hydrogen silisesquioxane

Chang, T. C., Liu, P-T., Tsai, T. M., Yeh, F. S., Tseng, T-Y., Tsai, M. S., Chen, B. C., Yang, Y. L. & Sze, S. M., 5月 2001, 於: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 40, 5R, p. 3143-3146 4 p.

研究成果: Article › 同行評審

8 引文斯高帕斯（Scopus）

Enhancing the resistance of low-k hydrogen silsesquioxane (HSQ) to wet stripper damage

Chang, T. C., Mor, Y. S., Liu, P-T., Tsai, T. M., Chen, C. W., Mei, Y. J. & Sze, S. M., 11月 2001, 於: Thin Solid Films. 398, 399, p. 523-526 4 p.

研究成果: Article › 同行評審

31 引文斯高帕斯（Scopus）

Improvement in Integration Issues for Organic Low-k Hybrid-Organic-Siloxane-Polymer

Liu, P-T., Chang, T. C., Su, H., Mor, Y. S., Yang, Y. L., Chung, H., Hou, J. & Sze, S. M., 1 12月 2001, 於: Journal of the Electrochemical Society. 148, 2

研究成果: Article › 同行評審

40 引文斯高帕斯（Scopus）

Improvement of low dielectric constant methylsilsesquioxane by boron implantation treatment

Chang, T. C., Mor, Y. S., Liu, P-T., Tsai, T. M., Chen, C. W., Sze, S. M. & Mei, Y. J., 11月 2001, 於: Thin Solid Films. 398, 399, p. 637-640 4 p.

研究成果: Article › 同行評審

9 引文斯高帕斯（Scopus）

The effect of ammonia plasma treatment on low-k methyl-hybrido-silsesquioxane against photoresist stripping damage

Chang, T. C., Mor, Y. S., Liu, P-T., Tsai, T. M., Chen, C. W., Mei, Y. J. & Sze, S. M., 11月 2001, 於: Thin Solid Films. 398, 399, p. 632-636 5 p.

研究成果: Article › 同行評審

20 引文斯高帕斯（Scopus）

2000

Effects of NHβ-plasma nitridation on the electrical characterizations of low-fc hydrogen silsesquioxane with copper interconnects

Liu, P-T., Chang, T. C., Yang, Y. L., Cheng, Y. F. & Sze, S. M., 1 9月 2000, 於: IEEE Transactions on Electron Devices. 47, 9, p. 1733-1739 7 p.

研究成果: Article › 同行評審

77 引文斯高帕斯（Scopus）

Enhancement of barrier properties in chemical vapor deposited TiN employing multi-stacked Ti/TiN structure

Chang, T. C., Liu, P-T., Yang, Y. L., Hu, J. C. & Sze, S. M., 2月 2000, 於: Japanese Journal of Applied Physics, Part 2: Letters. 39, 2 A

研究成果: Article › 同行評審

9 引文斯高帕斯（Scopus）

Improvement of post-chemical mechanical planarization characteristics on organic low k methylsilsesquioxane as intermetal dielectric

Liu, P-T., Chang, T. C., Huang, M. C., Yang, Y. L., Mor, Y. S., Tsai, M. S., Chung, H., Hou, J. & Sze, S. M., 1 11月 2000, 於: Journal of the Electrochemical Society. 147, 11, p. 4313-4317 5 p.

研究成果: Article › 同行評審

14 引文斯高帕斯（Scopus）

Improvement on intrinsic electrical properties of low-k hydrogen silsesquioxane/copper interconnects employing deuterium plasma treatment

Liu, P-T., Chang, T. C., Yang, Y. L., Cheng, Y. F., Lee, J. K., Shih, F. Y., Tsai, E., Chen, G. & Sze, S. M., 1 3月 2000, 於: Journal of the Electrochemical Society. 147, 3, p. 1186-1192 7 p.

研究成果: Article › 同行評審

23 引文斯高帕斯（Scopus）

Reliability of multistacked chemical vapor deposited Ti/TiN structure as the diffusion barrier in ultralarge scale integrated metallization

Liu, P-T., Chang, T. C., Hu, J. C., Yang, Y. L. & Sze, S. M., 1 1月 2000, 於: Journal of the Electrochemical Society. 147, 1, p. 368-372 5 p.

研究成果: Article › 同行評審

16 引文斯高帕斯（Scopus）

1999

Effectively blocking copper diffusion at low-k hydrogen silsesquioxane/copper interface

Liu, P-T., Chang, TC., Yang, YL., Cheng, YF., Shih, FY., Lee, JK., Tsai, E. & Sze, SM., 11月 1999, 於: Japanese Journal of Applied Physics. 38, 11, p. 6247-6252 6 p.

研究成果: Article › 同行評審

22 引文斯高帕斯（Scopus）

Effects of H-2 plasma treatment on low dielectric constant methylsilsesquioxane

Chang, TC., Liu, P-T., Mei, YJ., Mor, YS., Perng, TH., Yang, YL. & Sze, SM., 3月 1999, 於: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 17, 5, p. 2325-2330 6 p.

研究成果: Article › 同行評審

Effects of hydrogen on electrical and chemical properties of low-k hydrogen silsesquioxane as an intermetal dielectric for nonetchback processes

Chang, T. C., Liu, P-T., Shih, F. Y. & Sze, S. M., 1 8月 1999, 於: Electrochemical and Solid-State Letters. 2, 8, p. 390-392 3 p.

研究成果: Article › 同行評審

19 引文斯高帕斯（Scopus）

Enhancing the oxygen plasma resistance of low-k methylsilsesquioxane by H₂ plasma treatment

Liu, P-T., Chang, T. C., Mor, Y. S. & Sze, S. M., 6月 1999, 於: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 38, 6 A, p. 3482-3486 5 p.

研究成果: Article › 同行評審

62 引文斯高帕斯（Scopus）

The novel improvement of low dielectric constant methylsilsesquioxane by N ₂ O plasma treatment

Chang, T. C., Liu, P-T., Mor, Y. S., Sze, S. M., Yang, Y. L., Feng, M. S., Pan, F-M., Dai, B. T. & Chang, C. Y., 1 1月 1999, 於: Journal of the Electrochemical Society. 146, 10, p. 3802-3806 5 p.

研究成果: Article › 同行評審

63 引文斯高帕斯（Scopus）

1998

Electromagnetic transverse electric-wave inverse scattering of a conductor by the genetic algorithm

Chiu, C. C. & Liu, P-T., 1 1月 1998, 於: International Journal of Imaging Systems and Technology. 9, 5, p. 388-394 7 p.

研究成果: Article › 同行評審

9 引文斯高帕斯（Scopus）

The effects of plasma treatment for low dielectric constant hydrogen silsesquioxane (HSQ)

Liu, P-T., Chang, T. C., Sze, S. M., Pan, F-M., Mei, Y. J., Wu, W. F., Tsai, M. S., Dai, B. T., Chang, C. Y., Shih, F. Y. & Huang, H. D., 2 11月 1998, 於: Thin Solid Films. 332, 1-2, p. 345-350 6 p.

研究成果: Article › 同行評審

85 引文斯高帕斯（Scopus）

1996

Image reconstruction of a complex cylinder illuminated by TE waves

Chiu, CC. & Liu, P-T., 10月 1996, 於: IEEE Transactions on Microwave Theory and Techniques. 44, 10, p. 1921-1927 7 p.

研究成果: Article › 同行評審

14 引文斯高帕斯（Scopus）

Image reconstruction of a perfectly conducting cylinder by the genetic algorithm

Chiu, C. C. & Liu, P-T., 1 1月 1996, 於: IEE Proceedings: Microwaves, Antennas and Propagation. 143, 3, p. 249-253 5 p.

研究成果: Article › 同行評審

115 引文斯高帕斯（Scopus）

劉 柏村

研究成果

搜尋結果

劉柏村