Lo, F. S., Chiang, C. C.,
Li, C. & Lee, T. H.,
2014,
Semiconductor Wafer Bonding 13: Science, Technology, and Applications. Suga, T., Goorsky, M. S., Knechtel, R., Moriceau, H., Baumgart, H., Tan, C. S. & Hobart, K. D. (編輯).
5 編輯 Electrochemical Society Inc.,
p. 111-117 7 p. (ECS Transactions; 卷 64, 編號 5).
研究成果: Conference contribution › 同行評審