Zinc oxide nanowire-poly(methyl methacrylate) dielectric layers for polymer capacitive pressure sensors

Yan Sheng Chen, Chien-Wen Hsieh*, Shih Ping Chen, Pin Yen Tseng, Cheng Wei Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

49 Scopus citations

Abstract

Polymer capacitive pressure sensors based on a dielectric composite layer of zinc oxide nanowire and poly(methyl methacrylate) show pressure sensitivity in the range of 2.63 × 10-3 to 9.95 × 10-3 cm2 gf-1. This represents an increase of capacitance change by as much as a factor of 23 over pristine polymer devices. An ultralight load of only 10 mg (corresponding to an applied pressure of ∼0.01 gf cm-2) can be clearly recognized, demonstrating remarkable characteristics of these nanowire-polymer capacitive pressure sensors. In addition, optical transmittance of the dielectric composite layer is approximately 90% in the visible wavelength region. Their low processing temperature, transparency, and flexible dielectric film makes them a highly promising means for flexible touching and pressure-sensing applications.

Original languageEnglish
Pages (from-to)45-50
Number of pages6
JournalACS Applied Materials and Interfaces
Volume7
Issue number1
DOIs
StatePublished - 14 Jan 2015

Keywords

  • Zinc oxide nanowire
  • capacitive pressure sensor
  • dielectric composite
  • poly(methyl methacrylate)
  • ultralight sensitivity

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