X-ray photoelectron spectroscopy energy band alignment of spin-on CoTiO3 high- k dielectric prepared by sol-gel spin coating method

Kuo Hsing Kao; Shiow Huey Chuang; Woei Cherng Wu; Tien-Sheng Chao; Jian Hao Chen; Ming Wen Ma; Reui Hong Gao; Michael Y. Chiang

doi:10.1063/1.2978231

X-ray photoelectron spectroscopy energy band alignment of spin-on CoTiO3 high- k dielectric prepared by sol-gel spin coating method

Kuo Hsing Kao^*
, Shiow Huey Chuang
, Woei Cherng Wu
, Tien-Sheng Chao
, Jian Hao Chen
, Ming Wen Ma
, Reui Hong Gao
, Michael Y. Chiang

^*Corresponding author for this work

Department of Electrophysics

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

The characteristics of CoTiO3 high- k dielectric prepared by sol-gel spin coating method had been demonstrated. High electrical permittivity (k∼40.2) of CoTiO3 dielectric was extracted via the transmission electron microscopy image and capacitance-voltage curves. In addition, the valence band offset between thermal SiO2 and spin-on CoTiO3 was about 4.0 eV, which was detected by x-ray photoelectron spectroscopy. The band gaps of thermal SiO2 and spin-on CoTiO3 were 9.0 and 2.2 eV, respectively. Energy band alignment of spin-on CoTiO3 directly with SiO2 and indirectly with Si was determined in this work.

Original language	English
Article number	092907
Journal	Applied Physics Letters
Volume	93
Issue number	9
DOIs	https://doi.org/10.1063/1.2978231
State	Published - 15 Sep 2008

Access to Document

10.1063/1.2978231

Cite this

@article{542d5ca4aed3467194d1f79456097974,

title = "X-ray photoelectron spectroscopy energy band alignment of spin-on CoTiO3 high- k dielectric prepared by sol-gel spin coating method",

abstract = "The characteristics of CoTiO3 high- k dielectric prepared by sol-gel spin coating method had been demonstrated. High electrical permittivity (k∼40.2) of CoTiO3 dielectric was extracted via the transmission electron microscopy image and capacitance-voltage curves. In addition, the valence band offset between thermal SiO2 and spin-on CoTiO3 was about 4.0 eV, which was detected by x-ray photoelectron spectroscopy. The band gaps of thermal SiO2 and spin-on CoTiO3 were 9.0 and 2.2 eV, respectively. Energy band alignment of spin-on CoTiO3 directly with SiO2 and indirectly with Si was determined in this work.",

author = "Kao, \{Kuo Hsing\} and Chuang, \{Shiow Huey\} and Wu, \{Woei Cherng\} and Tien-Sheng Chao and Chen, \{Jian Hao\} and Ma, \{Ming Wen\} and Gao, \{Reui Hong\} and Chiang, \{Michael Y.\}",

year = "2008",

month = sep,

day = "15",

doi = "10.1063/1.2978231",

language = "English",

volume = "93",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "9",

}

TY - JOUR

T1 - X-ray photoelectron spectroscopy energy band alignment of spin-on CoTiO3 high- k dielectric prepared by sol-gel spin coating method

AU - Kao, Kuo Hsing

AU - Chuang, Shiow Huey

AU - Wu, Woei Cherng

AU - Chao, Tien-Sheng

AU - Chen, Jian Hao

AU - Ma, Ming Wen

AU - Gao, Reui Hong

AU - Chiang, Michael Y.

PY - 2008/9/15

Y1 - 2008/9/15

N2 - The characteristics of CoTiO3 high- k dielectric prepared by sol-gel spin coating method had been demonstrated. High electrical permittivity (k∼40.2) of CoTiO3 dielectric was extracted via the transmission electron microscopy image and capacitance-voltage curves. In addition, the valence band offset between thermal SiO2 and spin-on CoTiO3 was about 4.0 eV, which was detected by x-ray photoelectron spectroscopy. The band gaps of thermal SiO2 and spin-on CoTiO3 were 9.0 and 2.2 eV, respectively. Energy band alignment of spin-on CoTiO3 directly with SiO2 and indirectly with Si was determined in this work.

AB - The characteristics of CoTiO3 high- k dielectric prepared by sol-gel spin coating method had been demonstrated. High electrical permittivity (k∼40.2) of CoTiO3 dielectric was extracted via the transmission electron microscopy image and capacitance-voltage curves. In addition, the valence band offset between thermal SiO2 and spin-on CoTiO3 was about 4.0 eV, which was detected by x-ray photoelectron spectroscopy. The band gaps of thermal SiO2 and spin-on CoTiO3 were 9.0 and 2.2 eV, respectively. Energy band alignment of spin-on CoTiO3 directly with SiO2 and indirectly with Si was determined in this work.

UR - https://www.scopus.com/pages/publications/51349145595

U2 - 10.1063/1.2978231

DO - 10.1063/1.2978231

M3 - Article

AN - SCOPUS:51349145595

SN - 0003-6951

VL - 93

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 9

M1 - 092907

ER -

X-ray photoelectron spectroscopy energy band alignment of spin-on CoTiO3 high- k dielectric prepared by sol-gel spin coating method

Abstract

Access to Document

Other files and links

Fingerprint

Cite this