X-Ray absorption studies of boron-carbon-nitrogen (Bx CyNz) ternary alloys

S. C. Ray, H. M. Tsai, J. W. Chiou, J. C. Jan, Krishna Kumar, W. F. Pong*, F. Z. Chien, M. H. Tsai, S. Chattopadhyay, L. C. Chen, S. C. Chien, M. T. Lee, S. T. Lin, K. H. Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

18 Scopus citations


X-Ray diffraction (XRD) and B, N and C K-edges X-ray absorption near-edge structure (XANES) measurements have been performed to study the BxCyNz ternary compounds. XRD reveals that the films contain carbon nitride, boron carbide, and boron nitride compounds. The combination of B, N and C K-edges XANES results reveal the presence of B-N, B-C, N-C, and C-N local bonding structures in Bx CyNz, indicating that boron-carbon-nitride thin films have a ternary phase, rather than a mixture of segregated binary phases.

Original languageEnglish
Pages (from-to)1553-1557
Number of pages5
JournalDiamond and Related Materials
Issue number4-8
StatePublished - Apr 2004


  • Boron-carbon-nitride
  • Electronic properties
  • Microstructure
  • X-Ray absorption near-edge structure (XANES)


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