Abstract
X-Ray diffraction (XRD) and B, N and C K-edges X-ray absorption near-edge structure (XANES) measurements have been performed to study the BxCyNz ternary compounds. XRD reveals that the films contain carbon nitride, boron carbide, and boron nitride compounds. The combination of B, N and C K-edges XANES results reveal the presence of B-N, B-C, N-C, and C-N local bonding structures in Bx CyNz, indicating that boron-carbon-nitride thin films have a ternary phase, rather than a mixture of segregated binary phases.
Original language | English |
---|---|
Pages (from-to) | 1553-1557 |
Number of pages | 5 |
Journal | Diamond and Related Materials |
Volume | 13 |
Issue number | 4-8 |
DOIs | |
State | Published - Apr 2004 |
Keywords
- Boron-carbon-nitride
- Electronic properties
- Microstructure
- X-Ray absorption near-edge structure (XANES)