X-Ray absorption studies of boron-carbon-nitrogen (Bx CyNz) ternary alloys

S. C. Ray, H. M. Tsai, J. W. Chiou, J. C. Jan, Krishna Kumar, W. F. Pong*, F. Z. Chien, M. H. Tsai, S. Chattopadhyay, L. C. Chen, S. C. Chien, M. T. Lee, S. T. Lin, K. H. Chen

*Corresponding author for this work

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21 Scopus citations

Abstract

X-Ray diffraction (XRD) and B, N and C K-edges X-ray absorption near-edge structure (XANES) measurements have been performed to study the BxCyNz ternary compounds. XRD reveals that the films contain carbon nitride, boron carbide, and boron nitride compounds. The combination of B, N and C K-edges XANES results reveal the presence of B-N, B-C, N-C, and C-N local bonding structures in Bx CyNz, indicating that boron-carbon-nitride thin films have a ternary phase, rather than a mixture of segregated binary phases.

Original languageEnglish
Pages (from-to)1553-1557
Number of pages5
JournalDiamond and Related Materials
Volume13
Issue number4-8
DOIs
StatePublished - Apr 2004

Keywords

  • Boron-carbon-nitride
  • Electronic properties
  • Microstructure
  • X-Ray absorption near-edge structure (XANES)

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