Abstract
In this study, we investigated various approaches to manipulate the flake density, size, and thickness of two-dimensional transition metal dichalcogenides by independently tuning the precursors and process conditions of the metal-organic chemical vapor deposition system. Normally off device characteristics were realized for both the as-grown and transferred cases.
Original language | English |
---|---|
Article number | 183101 |
Journal | Applied Physics Letters |
Volume | 123 |
Issue number | 18 |
DOIs | |
State | Published - 30 Oct 2023 |