Wafer-Scale Functional Metasurfaces on Free-Standing Membranes

Ming Lun Tseng*, Aleksandrs Leitis, Aurelian John-Herpin, Yuri S. Kivshar, Hatice Altug

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


We demonstrate free-standing metasurfaces made by a new wafer-scale and CMOS compatible nanofabrication method and produce nanostructures over large-area transparent oxide membranes. Applications include narrow-band spectral filtering, efficient light focusing, polarization control and optofluidic biosensors.

Original languageEnglish
Title of host publicationCLEO
Subtitle of host publicationQELS_Fundamental Science, QELS 2022
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)9781557528209
StatePublished - 2022
EventCLEO: QELS_Fundamental Science, QELS 2022 - San Jose, United States
Duration: 15 May 202220 May 2022

Publication series

NameOptics InfoBase Conference Papers


ConferenceCLEO: QELS_Fundamental Science, QELS 2022
Country/TerritoryUnited States
CitySan Jose


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