Wafer-Scale Functional Metasurfaces on Free-Standing Membranes

Ming Lun Tseng, Aleksandrs Leitis, Aurelian John-Herpin, Yuri S. Kivshar, Hatice Altug

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We demonstrate free-standing metasurfaces made by a new wafer-scale and CMOS compatible nanofabrication method and produce nanostructures over large-area transparent oxide membranes. Applications include narrow-band spectral filtering, efficient light focusing, polarization control and optofluidic biosensors.

Original languageEnglish
Title of host publication2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781957171050
StatePublished - 2022
Event2022 Conference on Lasers and Electro-Optics, CLEO 2022 - San Jose, United States
Duration: 15 May 202220 May 2022

Publication series

Name2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings

Conference

Conference2022 Conference on Lasers and Electro-Optics, CLEO 2022
Country/TerritoryUnited States
CitySan Jose
Period15/05/2220/05/22

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