Vertical channel metal-oxide clusters as sensitive NO2 sensor with modulated response at room temperature

Ting Hsuan Huang; Pei Yi Li; Jin Bin Yang; Te Yao Liu; Mei Hsin Chen; Po-Tsun Liu; Hsin-Fei Meng; Chia Jung Lu; Olivier Soppera; Ping Hung Yeh; Hsiao-Wen Zan

doi:10.1016/j.snb.2021.131222

Vertical channel metal-oxide clusters as sensitive NO₂ sensor with modulated response at room temperature

Ting Hsuan Huang, Pei Yi Li, Jin Bin Yang, Te Yao Liu, Mei Hsin Chen, Po-Tsun Liu, Hsin-Fei Meng, Chia Jung Lu, Olivier Soppera, Ping Hung Yeh^*, Hsiao-Wen Zan

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

We proposed room-temperature-operated sensitive NO₂ sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.

Original language	English
Article number	131222
Pages (from-to)	1-10
Number of pages	10
Journal	Sensors and Actuators, B: Chemical
Volume	354
DOIs	https://doi.org/10.1016/j.snb.2021.131222
State	Published - 1 Mar 2022

Keywords

Gas sensor
Hydroxyl group
Metal oxide cluster
Sol-gel

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10.1016/j.snb.2021.131222

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title = "Vertical channel metal-oxide clusters as sensitive NO2 sensor with modulated response at room temperature",

abstract = "We proposed room-temperature-operated sensitive NO2 sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.",

keywords = "Gas sensor, Hydroxyl group, Metal oxide cluster, Sol-gel",

author = "Huang, {Ting Hsuan} and Li, {Pei Yi} and Yang, {Jin Bin} and Liu, {Te Yao} and Chen, {Mei Hsin} and Po-Tsun Liu and Hsin-Fei Meng and Lu, {Chia Jung} and Olivier Soppera and Yeh, {Ping Hung} and Hsiao-Wen Zan",

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doi = "10.1016/j.snb.2021.131222",

language = "English",

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T1 - Vertical channel metal-oxide clusters as sensitive NO2 sensor with modulated response at room temperature

AU - Huang, Ting Hsuan

AU - Li, Pei Yi

AU - Yang, Jin Bin

AU - Liu, Te Yao

AU - Chen, Mei Hsin

AU - Liu, Po-Tsun

AU - Meng, Hsin-Fei

AU - Lu, Chia Jung

AU - Soppera, Olivier

AU - Yeh, Ping Hung

AU - Zan, Hsiao-Wen

PY - 2022/3/1

Y1 - 2022/3/1

N2 - We proposed room-temperature-operated sensitive NO2 sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.

AB - We proposed room-temperature-operated sensitive NO2 sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.

KW - Gas sensor

KW - Hydroxyl group

KW - Metal oxide cluster

KW - Sol-gel

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U2 - 10.1016/j.snb.2021.131222

DO - 10.1016/j.snb.2021.131222

M3 - Article

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SN - 0925-4005

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JO - Sensors and Actuators, B: Chemical

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ER -

Vertical channel metal-oxide clusters as sensitive NO₂ sensor with modulated response at room temperature

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Keywords

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