Vertical channel metal-oxide clusters as sensitive NO2 sensor with modulated response at room temperature

Ting Hsuan Huang, Pei Yi Li, Jin Bin Yang, Te Yao Liu, Mei Hsin Chen, Po-Tsun Liu, Hsin-Fei Meng, Chia Jung Lu, Olivier Soppera, Ping Hung Yeh*, Hsiao-Wen Zan

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

We proposed room-temperature-operated sensitive NO2 sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.

Original languageEnglish
Article number131222
Pages (from-to)1-10
Number of pages10
JournalSensors and Actuators, B: Chemical
Volume354
DOIs
StatePublished - 1 Mar 2022

Keywords

  • Gas sensor
  • Hydroxyl group
  • Metal oxide cluster
  • Sol-gel

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