TY - JOUR
T1 - Using ultrathin double-layer gas-permeable capping metal to form sensitive low-power gas sensors
AU - Madhaiyan, Govindasamy
AU - Chen, Chao Hsuan
AU - Lin, Hong-Cheu
AU - Meng, Hsin-Fei
AU - Zan, Hsiao-Wen
N1 - Publisher Copyright:
© 2020 IOP Publishing Ltd.
Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2020/12
Y1 - 2020/12
N2 - In this work, we investigated a simple, sensitive, and low-powered ammonia (NH3) gas sensor using a thin bi-layered metal capped on an organic semiconductor chemoresistor to deliver a sensitive response to NH3 (ppb level) at room temperature. An optimized thin bi-layered Al/Ag metal (2 nm/10 nm) successfully forms a gas-permeable structure to realize ppb-regime gas sensing better than other single-layered thin Ag, Al, or Au (12 nm) metal electrodes. The performance of the simple metal-capped gas sensor is greatly dependent on the surface roughness of the thin metal electrodes, and the very rough thin bi-layered metal Al/Ag (2 nm/10 nm) allows high gas penetration. The optimized device exhibits more than 10% response to 100 ppb NH3 at only 0.5 V. The simple, low-cost, highly sensitive, and low-powered gas sensors are promising for Internet of things applications.
AB - In this work, we investigated a simple, sensitive, and low-powered ammonia (NH3) gas sensor using a thin bi-layered metal capped on an organic semiconductor chemoresistor to deliver a sensitive response to NH3 (ppb level) at room temperature. An optimized thin bi-layered Al/Ag metal (2 nm/10 nm) successfully forms a gas-permeable structure to realize ppb-regime gas sensing better than other single-layered thin Ag, Al, or Au (12 nm) metal electrodes. The performance of the simple metal-capped gas sensor is greatly dependent on the surface roughness of the thin metal electrodes, and the very rough thin bi-layered metal Al/Ag (2 nm/10 nm) allows high gas penetration. The optimized device exhibits more than 10% response to 100 ppb NH3 at only 0.5 V. The simple, low-cost, highly sensitive, and low-powered gas sensors are promising for Internet of things applications.
KW - ammonia gas sensor
KW - low-powered
KW - organic semiconductor
KW - ultrathin metal electrode
UR - http://www.scopus.com/inward/record.url?scp=85094976232&partnerID=8YFLogxK
U2 - 10.1088/1361-6641/abbaef
DO - 10.1088/1361-6641/abbaef
M3 - Article
AN - SCOPUS:85094976232
SN - 0268-1242
VL - 35
SP - 1
EP - 7
JO - Semiconductor Science and Technology
JF - Semiconductor Science and Technology
IS - 12
M1 - 124001
ER -