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Uniform Crystal Formation and Electrical Variability Reduction in Hafnium-Oxide-Based Ferroelectric Memory by Thermal Engineering
Sourav De, Bo Han Qiu, Wei Xuan Bu, Mohammad Aftab Baig, Po Jung Sung, Chun Jung Su, Yao Jen Lee, Darsen D. Lu*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
41
Scopus
citations