Ultra-shallow junction formation using implantation through capping nitride layer on source/drain extension

Li Jen Hsien*, Yi Lin Chan, Tien-Sheng Chao, Yeu Long Jiang, Chung Yuan Kung

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Ultra-shallow junction formation using implantation through capping nitride layer on source/drain extension'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science