TY - JOUR
T1 - Two-way membrane-type micro-actuator with continuous deflections
AU - Hsu, Chenpeng
AU - Hsu, Wen-Syang
PY - 2000/9/1
Y1 - 2000/9/1
N2 - This paper presents design, simulation, fabrication, and testing of a novel two-way micro-membrane actuator able to deflect in both upward and downward directions with continuous deflections. The design concept, to realize two-way continuous movement, is achieved by arranging different bimorph structures at different regions of the actuator with two kinds of boundary conditions. The actuator comprises of a square membrane with four bimorph beams and one central bimorph plate on it. The material (e.g. aluminum) on the top layer of the bimorph beams and plate has a larger thermal expansion coefficient than the material (e.g. silicon dioxide) of the membrane. The driving voltages in the two operating modes are both less than 3.5 V at about 350 mW maximum power consumption for an 1 mm2 membrane actuator. The upward and downward deflections achieved up to 50 and 15 μm with maximum simulated temperatures less than 420 and 150 °C, respectively. A finite-element model is build to simulate the thermal mechanical behaviors that are compared with the experimental results. The design parameters influencing the deflections of the actuator are also discussed.
AB - This paper presents design, simulation, fabrication, and testing of a novel two-way micro-membrane actuator able to deflect in both upward and downward directions with continuous deflections. The design concept, to realize two-way continuous movement, is achieved by arranging different bimorph structures at different regions of the actuator with two kinds of boundary conditions. The actuator comprises of a square membrane with four bimorph beams and one central bimorph plate on it. The material (e.g. aluminum) on the top layer of the bimorph beams and plate has a larger thermal expansion coefficient than the material (e.g. silicon dioxide) of the membrane. The driving voltages in the two operating modes are both less than 3.5 V at about 350 mW maximum power consumption for an 1 mm2 membrane actuator. The upward and downward deflections achieved up to 50 and 15 μm with maximum simulated temperatures less than 420 and 150 °C, respectively. A finite-element model is build to simulate the thermal mechanical behaviors that are compared with the experimental results. The design parameters influencing the deflections of the actuator are also discussed.
UR - http://www.scopus.com/inward/record.url?scp=0034273077&partnerID=8YFLogxK
U2 - 10.1088/0960-1317/10/3/313
DO - 10.1088/0960-1317/10/3/313
M3 - Article
AN - SCOPUS:0034273077
SN - 0960-1317
VL - 10
SP - 387
EP - 394
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 3
ER -