TY - GEN
T1 - Two-dimensional focusing grating couplers for SOI waveguides
AU - Chang, Chihchi
AU - Hsu, Yijang
AU - Kuo, Hsaunming
AU - Hsu, Shichieh
AU - Lai, Yinchieh
N1 - Publisher Copyright:
© 2020 IEEE.
Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2020/10/4
Y1 - 2020/10/4
N2 - We have designed a compact focusing two dimensional grating coupler which consist of 70 nm shallow etch and 160 nm poly-silicon overlay for coupling between the optical fiber and 220 nm silicon-on-insulator (SOI) waveguides. The maximum coupling efficiency is increased with the added poly-silicon cylinders, reaching a mean coupling efficiency of 44.4% (-3.52 dB) at 1550 nm wavelength. The focusing grating structure exhibits excellent size reduction advantages when compared to the standard nonfocusing grating structure.
AB - We have designed a compact focusing two dimensional grating coupler which consist of 70 nm shallow etch and 160 nm poly-silicon overlay for coupling between the optical fiber and 220 nm silicon-on-insulator (SOI) waveguides. The maximum coupling efficiency is increased with the added poly-silicon cylinders, reaching a mean coupling efficiency of 44.4% (-3.52 dB) at 1550 nm wavelength. The focusing grating structure exhibits excellent size reduction advantages when compared to the standard nonfocusing grating structure.
KW - Focusing grating coupler
KW - polarization diversity
KW - silicon photonics
UR - https://www.scopus.com/pages/publications/85098690858
U2 - 10.1109/OECC48412.2020.9273557
DO - 10.1109/OECC48412.2020.9273557
M3 - Conference contribution
AN - SCOPUS:85098690858
T3 - 25th Opto-Electronics and Communications Conference, OECC 2020
BT - 25th Opto-Electronics and Communications Conference, OECC 2020
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 25th Opto-Electronics and Communications Conference, OECC 2020
Y2 - 4 October 2020 through 8 October 2020
ER -