Two-axis MEMS scanners with radial vertical combdrive actuators - Design, theoretical analysis, and fabrication

  • Jui Che Tsai*
  • , Sheng Jie Chiou
  • , Tien Liang Hsieh
  • , Chia-Wei Sun
  • , Dooyoung Hah
  • , Ming C. Wu
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

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Engineering