Two-axis MEMS scanners with radial vertical combdrive actuators - Design, theoretical analysis, and fabrication
- Jui Che Tsai*
- , Sheng Jie Chiou
- , Tien Liang Hsieh
- , Chia-Wei Sun
- , Dooyoung Hah
- , Ming C. Wu
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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