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Two-axis MEMS scanners with radial vertical combdrive actuators - Design, theoretical analysis, and fabrication
Jui Che Tsai*, Sheng Jie Chiou, Tien Liang Hsieh, Chia-Wei Sun, Dooyoung Hah, Ming C. Wu
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
22
Scopus
citations