Two-axis MEMS scanners with radial vertical combdrive actuators - Design, theoretical analysis, and fabrication

Jui Che Tsai; Sheng Jie Chiou; Tien Liang Hsieh; Chia-Wei Sun; Dooyoung Hah; Ming C. Wu

doi:10.1088/1464-4258/10/4/044006

Two-axis MEMS scanners with radial vertical combdrive actuators - Design, theoretical analysis, and fabrication

Jui Che Tsai^*, Sheng Jie Chiou, Tien Liang Hsieh, Chia-Wei Sun, Dooyoung Hah, Ming C. Wu

^*Corresponding author for this work

Department of Photonics

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Abstract

We propose the employment of radial vertical combdrive actuators to implement two-axis micro-electro-mechanical systems (MEMS) scanners. The devices are designed based on a five-layer polysilicon surface micromachining process. A cross-bar spring structure consisting of lower and upper torsion springs is incorporated to achieve two rotational degrees of freedom, enabling the dual-axis rotation. Both the vertical combdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. Theoretical analysis is performed for comparison of various designs. Preliminary experimental results are also obtained.

Original language	English
Article number	044006
Journal	Journal of Optics A: Pure and Applied Optics
Volume	10
Issue number	4
DOIs	https://doi.org/10.1088/1464-4258/10/4/044006
State	Published - 1 Apr 2008

Keywords

Radial combdrive actuators
Small form factor
Surface micromachining
Two-axis scanner

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abstract = "We propose the employment of radial vertical combdrive actuators to implement two-axis micro-electro-mechanical systems (MEMS) scanners. The devices are designed based on a five-layer polysilicon surface micromachining process. A cross-bar spring structure consisting of lower and upper torsion springs is incorporated to achieve two rotational degrees of freedom, enabling the dual-axis rotation. Both the vertical combdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. Theoretical analysis is performed for comparison of various designs. Preliminary experimental results are also obtained.",

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AU - Chiou, Sheng Jie

AU - Hsieh, Tien Liang

AU - Sun, Chia-Wei

AU - Hah, Dooyoung

AU - Wu, Ming C.

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AB - We propose the employment of radial vertical combdrive actuators to implement two-axis micro-electro-mechanical systems (MEMS) scanners. The devices are designed based on a five-layer polysilicon surface micromachining process. A cross-bar spring structure consisting of lower and upper torsion springs is incorporated to achieve two rotational degrees of freedom, enabling the dual-axis rotation. Both the vertical combdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. Theoretical analysis is performed for comparison of various designs. Preliminary experimental results are also obtained.

KW - Radial combdrive actuators

KW - Small form factor

KW - Surface micromachining

KW - Two-axis scanner

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Two-axis MEMS scanners with radial vertical combdrive actuators - Design, theoretical analysis, and fabrication

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