TRIAD: A triple patterning lithography aware detailed router

Yen Hung Lin; Bei Yu; David Z. Pan; Yih-Lang Li

doi:10.1145/2429384.2429408

TRIAD: A triple patterning lithography aware detailed router

Yen Hung Lin^*, Bei Yu, David Z. Pan, Yih-Lang Li

^*Corresponding author for this work

Department of Computer Science

Research output: Contribution to journal › Conference article › peer-review

35 Scopus citations

Abstract

TPL-friendly detailed routers require a systematic approach to detect TPL conflicts. However, the complexity of conflict graph (CG) impedes directly detecting TPL conflicts in CG. This work proposes a token graph-embedded conflict graph (TECG) to facilitate the TPL conflict detection while maintaining high coloring-flexibility. We then develop a TPL aware detailed router (TRIAD) by applying TECG to a gridless router with the TPL stitch generation. Compared to a greedy coloring approach, experimental results indicate that TRIAD generates no conflicts and few stitches with shorter wirelength at the cost of 2.41× of runtime.

Original language	English
Article number	6386598
Pages (from-to)	123-129
Number of pages	7
Journal	IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers, ICCAD
DOIs	https://doi.org/10.1145/2429384.2429408
State	Published - 1 Dec 2012
Event	2012 30th IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2012 - San Jose, CA, United States Duration: 5 Nov 2012 → 8 Nov 2012

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title = "TRIAD: A triple patterning lithography aware detailed router",

abstract = "TPL-friendly detailed routers require a systematic approach to detect TPL conflicts. However, the complexity of conflict graph (CG) impedes directly detecting TPL conflicts in CG. This work proposes a token graph-embedded conflict graph (TECG) to facilitate the TPL conflict detection while maintaining high coloring-flexibility. We then develop a TPL aware detailed router (TRIAD) by applying TECG to a gridless router with the TPL stitch generation. Compared to a greedy coloring approach, experimental results indicate that TRIAD generates no conflicts and few stitches with shorter wirelength at the cost of 2.41× of runtime.",

author = "Lin, {Yen Hung} and Bei Yu and Pan, {David Z.} and Yih-Lang Li",

year = "2012",

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doi = "10.1145/2429384.2429408",

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AU - Lin, Yen Hung

AU - Yu, Bei

AU - Pan, David Z.

AU - Li, Yih-Lang

PY - 2012/12/1

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N2 - TPL-friendly detailed routers require a systematic approach to detect TPL conflicts. However, the complexity of conflict graph (CG) impedes directly detecting TPL conflicts in CG. This work proposes a token graph-embedded conflict graph (TECG) to facilitate the TPL conflict detection while maintaining high coloring-flexibility. We then develop a TPL aware detailed router (TRIAD) by applying TECG to a gridless router with the TPL stitch generation. Compared to a greedy coloring approach, experimental results indicate that TRIAD generates no conflicts and few stitches with shorter wirelength at the cost of 2.41× of runtime.

AB - TPL-friendly detailed routers require a systematic approach to detect TPL conflicts. However, the complexity of conflict graph (CG) impedes directly detecting TPL conflicts in CG. This work proposes a token graph-embedded conflict graph (TECG) to facilitate the TPL conflict detection while maintaining high coloring-flexibility. We then develop a TPL aware detailed router (TRIAD) by applying TECG to a gridless router with the TPL stitch generation. Compared to a greedy coloring approach, experimental results indicate that TRIAD generates no conflicts and few stitches with shorter wirelength at the cost of 2.41× of runtime.

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JO - IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers

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SN - 1092-3152

M1 - 6386598

Y2 - 5 November 2012 through 8 November 2012

ER -

TRIAD: A triple patterning lithography aware detailed router

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