Transportation model establishment of InGaZnO for thin film transistor device application

Li Feng Teng; Po-Tsun Liu; Yi Teh Chou; Yang Shun Fan

Transportation model establishment of InGaZnO for thin film transistor device application

Li Feng Teng^*, Po-Tsun Liu, Yi Teh Chou, Yang Shun Fan

^*Corresponding author for this work

Department of Photonics

Research output: Contribution to conference › Paper › peer-review

1 Scopus citations

Abstract

The transportation model of on electrical metastability of a-InGaZnO TFT is established. The generation of oxygen vacancies by the annealing in a vacuum led to an increased I_off and large V_th shifts, while N₂ and O₂ ambience effectively improve the device performance. A physical mechanism is also reasonably proposed.

Original language	English
Pages	1845-1847
Number of pages	3
State	Published - 1 Dec 2010
Event	17th International Display Workshops, IDW'10 - Fukuoka, Japan Duration: 1 Dec 2010 → 3 Dec 2010

Conference

Conference	17th International Display Workshops, IDW'10
Country/Territory	Japan
City	Fukuoka
Period	1/12/10 → 3/12/10

Cite this

@conference{afce419caab54b308f0b9f9aaa5da2e8,

title = "Transportation model establishment of InGaZnO for thin film transistor device application",

abstract = "The transportation model of on electrical metastability of a-InGaZnO TFT is established. The generation of oxygen vacancies by the annealing in a vacuum led to an increased Ioff and large Vth shifts, while N2 and O2 ambience effectively improve the device performance. A physical mechanism is also reasonably proposed.",

author = "Teng, {Li Feng} and Po-Tsun Liu and Chou, {Yi Teh} and Fan, {Yang Shun}",

year = "2010",

month = dec,

day = "1",

language = "English",

pages = "1845--1847",

note = "17th International Display Workshops, IDW'10 ; Conference date: 01-12-2010 Through 03-12-2010",

}

TY - CONF

T1 - Transportation model establishment of InGaZnO for thin film transistor device application

AU - Teng, Li Feng

AU - Liu, Po-Tsun

AU - Chou, Yi Teh

AU - Fan, Yang Shun

PY - 2010/12/1

Y1 - 2010/12/1

N2 - The transportation model of on electrical metastability of a-InGaZnO TFT is established. The generation of oxygen vacancies by the annealing in a vacuum led to an increased Ioff and large Vth shifts, while N2 and O2 ambience effectively improve the device performance. A physical mechanism is also reasonably proposed.

AB - The transportation model of on electrical metastability of a-InGaZnO TFT is established. The generation of oxygen vacancies by the annealing in a vacuum led to an increased Ioff and large Vth shifts, while N2 and O2 ambience effectively improve the device performance. A physical mechanism is also reasonably proposed.

UR - http://www.scopus.com/inward/record.url?scp=79956323444&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:79956323444

SP - 1845

EP - 1847

T2 - 17th International Display Workshops, IDW'10

Y2 - 1 December 2010 through 3 December 2010

ER -

Transportation model establishment of InGaZnO for thin film transistor device application

Abstract

Conference

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