TiN-C Based CMOS MEMS Pirani Gauge for on-Chip Pressure Measurement

Manu Garg, Fang Wei Tsai, Khanjan Joshi, Yi Chiu, Pushpapraj Singh

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Fingerprint

Dive into the research topics of 'TiN-C Based CMOS MEMS Pirani Gauge for on-Chip Pressure Measurement'. Together they form a unique fingerprint.

Keyphrases

Engineering

Earth and Planetary Sciences

Material Science