TiN-C Based CMOS MEMS Pirani Gauge for on-Chip Pressure Measurement

Manu Garg, Fang Wei Tsai, Khanjan Joshi, Yi Chiu, Pushpapraj Singh

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations


The paper presents a monolithically integrable CMOS back-end-of-line (BEOL) integrated MEMS Pirani gauge. The proposed idea is implemented using a TiN-C platform based on a 0.35 μm 2P4M commercial CMOS process. In the given implementation, TiN in the interconnect layer is explored as a heating element. Owing to the lower thermal conductivity (4 W/m.K) of TiN, excellent thermal isolation of intermetal dielectric layers, and a narrow vertical conduction gap, the gauge exhibits a wide dynamic range from 26 Pa to 106 Pa. Experimental results of the fabricated devices are in excellent agreement with the simulated curve with a maximum error of 0.04%. Additionally, the fabricated gauge demonstrates excellent reproducibility while maintaining an acceptable error margin of ≤ 0.01 % over the entire range.

Original languageEnglish
Title of host publication2023 IEEE SENSORS, SENSORS 2023 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350303872
StatePublished - 2023
Event2023 IEEE SENSORS, SENSORS 2023 - Vienna, Austria
Duration: 29 Oct 20231 Nov 2023

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229


Conference2023 IEEE SENSORS, SENSORS 2023


  • BEOL
  • MEMS
  • Monolithic Integration
  • Pirani gauge


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