Thermochemical reaction of ZrOx(Ny) interfaces on Ge and Si substrates

Chao Ching Cheng*, Chao-Hsin Chien, Je Hung Lin, Chun Yen Chang, Guang Li Luo, Chun Hui Yang, Shih Lu Hsu

*Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

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    Physics & Astronomy