The sputtering of PtSi and NiSi

J. M. Poate*, W. L. Brown, R. Homer, W. M. Augustyniak, J. W. Mayer, King-Ning Tu, W. F. van der Weg

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

57 Scopus citations

Fingerprint

Dive into the research topics of 'The sputtering of PtSi and NiSi'. Together they form a unique fingerprint.