The Impact of Nano Device Parameters Variations and Scaling Strategy for High Frequency Performance Enhancement in Nanoscale CMOS

Adhi Cahyo Wijaya, Jinq Min Lin, Jyh Chyurn Guo

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper presents a new observation in sub-60nm multi-finger (MF) nMOSFETs with nearly the same dc characteristics like channel current (IDS) and transconductance (gm) from different dies/lots but a dramatic difference at high frequency parameters, such as intrinsic gate capacitances (Cgg) and unit gain cut-off frequency fT after a clean deembedding to the bottom metal. The experimental results reveal an important finding that nanoscale devices even with inter-dies/lots process variations may keep the golden die target for dc and logic circuits performance but exhibit a significant deviation in high frequency performance. A comprehensive high frequency characterization and precise device parameters extraction has been carried out on various MF nMOSFETs to identify the root causes and explore the underlying mechanisms.

Original languageEnglish
Title of host publication2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665409230
DOIs
StatePublished - 2022
Event2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022 - Hsinchu, Taiwan
Duration: 18 Apr 202221 Apr 2022

Publication series

Name2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022

Conference

Conference2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022
Country/TerritoryTaiwan
CityHsinchu
Period18/04/2221/04/22

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