The impact of deep Ni salicidation and NH3 plasma treatment on nano-SOI FinFETs

Hsin Chiang You*, Po Yi Kuo, Fu-Hsiang Ko, Tien-Sheng Chao, Tan Fu Lei

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

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Engineering & Materials Science

Chemical Compounds