Abstract
In this article, we report the effect of indium tin oxide (ITO) as a p-type ohmic contact for the 850 nm GaAs oxide-confined vertical-cavity surface-emitting lasers (VCSELs). The VCSELs with ITO contact have a threshold current of 0.96 mA, a full-width-at-half-maximum angle of beam divergence of 27° and an ellipticity of 103.8% for the far-field pattern at a 10-mA driving current, which are the same as those of the conventional VCSELs with Au/Zn/Au or Ti/Pt/Au ohmic contacts. In addition, the VCSELs with ITO contact exhibit a light output power of 1.27 times in magnitude higher than those of the conventional VCSELs.
Original language | English |
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Pages (from-to) | 1945-1948 |
Number of pages | 4 |
Journal | Solid-State Electronics |
Volume | 46 |
Issue number | 11 |
DOIs | |
State | Published - Nov 2002 |
Keywords
- Indium tin oxide
- Vertical-cavity surface-emitting lasers