The design and characteristic study of a 3-dimensional piezoelectric nano-positioner

Yu Chi Wang*, Li Kang Chen, Shao-Kang Hung

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations


This paper presents a mechanical design method of "thin column group" guidance and multi-actuator parallel mechanism for three degrees of freedom translations, since multiactuator parallel mechanism is utilized to implement planar motions which are general requirements for the nano-positioner. The traveling range of this nano-positioner is 5 μm in the X-, Ydirections and in the vertical direction. The three-dimensional nano-positioner has several advantages such as low-cost, highprecision, and can be applied to the assembly, processing, biotech and medicine detection and semi-conduct industry. In the feedback controller, we choose MATLAB/Simulink, Real-Time Workshop, a software widely used by the academic community, as tools to study rapid controller prototyping. The parameters are controlled based on proportion-integral control law that is easily used and has a good performance.

Original languageEnglish
Title of host publicationProceedings of SICE Annual Conference 2010, SICE 2010 - Final Program and Papers
PublisherSociety of Instrument and Control Engineers (SICE)
Number of pages5
ISBN (Print)9784907764364
StatePublished - 1 Jan 2010

Publication series

NameProceedings of the SICE Annual Conference


  • AFM
  • Nano-positioner
  • PID
  • Piezoelectric
  • Simulink
  • Thin column group


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