Abstract
High gate tunneling current level from ultra-thin gate dielectric leads to a tendency of full depletion. By studying the hole concentration profile under the worst case scenario with Vg=- Vdd, a method of categorizing ultra thin film SOI MOSFETs is proposed. A design analysis of FD SOI device using this method is demonstrated.
Original language | English |
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Pages | 140-142 |
Number of pages | 3 |
DOIs | |
State | Published - 2002 |
Event | IEEE International SOI Conference - Williamsburg, VA, United States Duration: 7 Oct 2002 → 10 Oct 2002 |
Conference
Conference | IEEE International SOI Conference |
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Country/Territory | United States |
City | Williamsburg, VA |
Period | 7/10/02 → 10/10/02 |