Temperature dependence of thin-film transistors electrical characteristics with multiple nano-wire channels

Che Yu Yang; Yung Chun Wu; Ting Chang Chang; Po-Tsun Liu; Chi Shen Chen; Chun Hao Tu; Chun Yen Chang

Temperature dependence of thin-film transistors electrical characteristics with multiple nano-wire channels

Che Yu Yang^*, Yung Chun Wu, Ting Chang Chang, Po-Tsun Liu, Chi Shen Chen, Chun Hao Tu, Chun Yen Chang

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We have investigated the temperature dependent electrical characteristics of lightly-doped drain (LDD) polysilicon thin-film transistors (poly-Si TFTs) with a series of multi-channel with different widths from 25°C to 175°C. The ten 67 nm-wide split channels TFT has best transfer characteristics, because of it's robust trigate control and grain boundary defects is the lowest, due to its split nano-wires structure with effective NH₃ plasma passivation.

Original language	English
Title of host publication	Proceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05
Editors	H.P. David Shieh, F.C. Chen
Pages	500-502
Number of pages	3
State	Published - Feb 2005
Event	International Display Manufacturing Conference and Exhibition, IDMC'05 - Taipei, Japan Duration: 21 Feb 2005 → 24 Feb 2005

Publication series

Name	International Display Manufacturing Conference and Exhibition, IDMC'05

Conference

Conference	International Display Manufacturing Conference and Exhibition, IDMC'05
Country/Territory	Japan
City	Taipei
Period	21/02/05 → 24/02/05

Cite this

Yang, C. Y., Wu, Y. C., Chang, T. C., Liu, P.-T., Chen, C. S., Tu, C. H., & Chang, C. Y. (2005). Temperature dependence of thin-film transistors electrical characteristics with multiple nano-wire channels. In H. P. David Shieh, & F. C. Chen (Eds.), Proceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05 (pp. 500-502). (International Display Manufacturing Conference and Exhibition, IDMC'05).

Yang, Che Yu ; Wu, Yung Chun ; Chang, Ting Chang et al. / Temperature dependence of thin-film transistors electrical characteristics with multiple nano-wire channels. Proceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05. editor / H.P. David Shieh ; F.C. Chen. 2005. pp. 500-502 (International Display Manufacturing Conference and Exhibition, IDMC'05).

@inproceedings{0b042b60069045f598aad383c3c3c335,

title = "Temperature dependence of thin-film transistors electrical characteristics with multiple nano-wire channels",

abstract = "We have investigated the temperature dependent electrical characteristics of lightly-doped drain (LDD) polysilicon thin-film transistors (poly-Si TFTs) with a series of multi-channel with different widths from 25°C to 175°C. The ten 67 nm-wide split channels TFT has best transfer characteristics, because of it's robust trigate control and grain boundary defects is the lowest, due to its split nano-wires structure with effective NH3 plasma passivation.",

author = "Yang, {Che Yu} and Wu, {Yung Chun} and Chang, {Ting Chang} and Po-Tsun Liu and Chen, {Chi Shen} and Tu, {Chun Hao} and Chang, {Chun Yen}",

year = "2005",

month = feb,

language = "English",

isbn = "9572852221",

series = "International Display Manufacturing Conference and Exhibition, IDMC'05",

pages = "500--502",

editor = "{David Shieh}, H.P. and F.C. Chen",

booktitle = "Proceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05",

note = "International Display Manufacturing Conference and Exhibition, IDMC'05 ; Conference date: 21-02-2005 Through 24-02-2005",

}

Yang, CY, Wu, YC, Chang, TC, Liu, P-T, Chen, CS, Tu, CH & Chang, CY 2005, Temperature dependence of thin-film transistors electrical characteristics with multiple nano-wire channels. in HP David Shieh & FC Chen (eds), Proceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05. International Display Manufacturing Conference and Exhibition, IDMC'05, pp. 500-502, International Display Manufacturing Conference and Exhibition, IDMC'05, Taipei, Japan, 21/02/05.

Temperature dependence of thin-film transistors electrical characteristics with multiple nano-wire channels. / Yang, Che Yu; Wu, Yung Chun; Chang, Ting Chang et al.
Proceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05. ed. / H.P. David Shieh; F.C. Chen. 2005. p. 500-502 (International Display Manufacturing Conference and Exhibition, IDMC'05).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Temperature dependence of thin-film transistors electrical characteristics with multiple nano-wire channels

AU - Yang, Che Yu

AU - Wu, Yung Chun

AU - Chang, Ting Chang

AU - Liu, Po-Tsun

AU - Chen, Chi Shen

AU - Tu, Chun Hao

AU - Chang, Chun Yen

PY - 2005/2

Y1 - 2005/2

N2 - We have investigated the temperature dependent electrical characteristics of lightly-doped drain (LDD) polysilicon thin-film transistors (poly-Si TFTs) with a series of multi-channel with different widths from 25°C to 175°C. The ten 67 nm-wide split channels TFT has best transfer characteristics, because of it's robust trigate control and grain boundary defects is the lowest, due to its split nano-wires structure with effective NH3 plasma passivation.

AB - We have investigated the temperature dependent electrical characteristics of lightly-doped drain (LDD) polysilicon thin-film transistors (poly-Si TFTs) with a series of multi-channel with different widths from 25°C to 175°C. The ten 67 nm-wide split channels TFT has best transfer characteristics, because of it's robust trigate control and grain boundary defects is the lowest, due to its split nano-wires structure with effective NH3 plasma passivation.

UR - http://www.scopus.com/inward/record.url?scp=33644654125&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:33644654125

SN - 9572852221

T3 - International Display Manufacturing Conference and Exhibition, IDMC'05

SP - 500

EP - 502

BT - Proceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05

A2 - David Shieh, H.P.

A2 - Chen, F.C.

T2 - International Display Manufacturing Conference and Exhibition, IDMC'05

Y2 - 21 February 2005 through 24 February 2005

ER -

Yang CY, Wu YC, Chang TC, Liu PT, Chen CS, Tu CH et al. Temperature dependence of thin-film transistors electrical characteristics with multiple nano-wire channels. In David Shieh HP, Chen FC, editors, Proceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05. 2005. p. 500-502. (International Display Manufacturing Conference and Exhibition, IDMC'05).

Temperature dependence of thin-film transistors electrical characteristics with multiple nano-wire channels

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