TY - GEN
T1 - T-Shaped Gated Poly-Si Thin-Film Transistor Technology for Advanced Logic and RF Applications
AU - Lin, Horng Chih
AU - Lee, Cheng Kuei
AU - Yu, Po Hsun
AU - Li, Pei Wen
AU - Chen, Kun Ming
AU - Huang, Guo Wei
N1 - Publisher Copyright:
© 2022 International Society of Functional Thin Film Materals & Devices (FTFMD).
PY - 2022
Y1 - 2022
N2 - In this talk we propose a novel T-gate poly-Si TFT process scheme which can be employed for the construction of advanced system-on-panel products. Several unique features, including T-gate, ingenious doping profile, silicided gate/source/drain, and sidewall air spacers, are combined in the fabricated devices and are beneficial for improving device performance. Principles and skills about the self-aligned formation of these structural features are detailed. Potential merits brought about by the proposed scheme with design considerations in source/drain doping profile specifically for logic and RF devices are also revealed and demonstrated.
AB - In this talk we propose a novel T-gate poly-Si TFT process scheme which can be employed for the construction of advanced system-on-panel products. Several unique features, including T-gate, ingenious doping profile, silicided gate/source/drain, and sidewall air spacers, are combined in the fabricated devices and are beneficial for improving device performance. Principles and skills about the self-aligned formation of these structural features are detailed. Potential merits brought about by the proposed scheme with design considerations in source/drain doping profile specifically for logic and RF devices are also revealed and demonstrated.
UR - http://www.scopus.com/inward/record.url?scp=85137792799&partnerID=8YFLogxK
U2 - 10.23919/AM-FPD54920.2022.9851273
DO - 10.23919/AM-FPD54920.2022.9851273
M3 - Conference contribution
AN - SCOPUS:85137792799
T3 - Proceedings of AM-FPD 2022 - 29th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials
SP - 78
EP - 81
BT - Proceedings of AM-FPD 2022 - 29th International Workshop on Active-Matrix Flatpanel Displays and Devices
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 29th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2022
Y2 - 5 July 2022 through 8 July 2022
ER -