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Symmetric vertical-channel nickel-salicided poly-Si thin-film transistors with self-aligned oxide overetching structures
Yi Hong Wu*, Po Yi Kuo, Yi Hsien Lu, Yi Hsuan Chen, Tsung Yu Chiang, Kuan Ti Wang, Li Chen Yen, Tien-Sheng Chao
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
4
Scopus
citations