Surface-enhanced Raman spectroscopy using self-assembled silver nanoparticles on silicon nanotips

Surojit Chattopadhyay*, Hung Chun Lo, Chih Hsun Hsu, Li Chyong Chen, Kuei Hsien Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

88 Scopus citations


A new substrate for surface-enhanced Raman spectroscopy has been developed in the form of silicon nanotips, by electron cyclotron resonance plasma chemical vapor deposition, with apex diameters of ∼2 nm, lengths of 1000 nm, and densities of 1011/cm2. The surface areas of the nanotips are ∼150 m2cm-3, comparable with the best-quality porous silicon. Ion-beam-sputtered silver self-assembles on these substrates as nanoparticles of 4-10 nm diameter and these metallic nanoparticles act as surface enhancement centers for Raman spectroscopy. Standard molecules such as Rhodamine 6G and trans-1,2-bis(4-pyridyl)ethylene (BPE) of concentrations in the range of 10-6 to 10-10 M have been studied on these substrates and enhancements in the range of 106 to 108 were observed. These dry etched substrates, unlike those conventionally prepared by wet chemistry, are compatible with silicon device technology and are remarkably stable and reproducible.

Original languageEnglish
Pages (from-to)553-559
Number of pages7
JournalChemistry of Materials
Issue number3
StatePublished - 8 Feb 2005


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