@inproceedings{43fbb970eb3e4671b83d89ea52e2c91a,
title = "Subwavelength apodized grating coupler for silicon photonics waveguide coupling",
abstract = "A high coupling efficiency grating coupler with subwavelength nanostructure for grating strength apodization is investigated for silicon photonics waveguide coupling application. Based on the 220 nm silicon-on-insulator (SOI) platform with 70 nm shallow etch and 160 nm poly-silicon overlay, maximum coupling efficiency of -1.72dB at 1550 nm wavelength and 1 dB bandwidth of 42 nm are achieved without the use of any back-reflector.",
keywords = "Diffraction gratings, silicon photonics, subwavelength structures",
author = "Chihchi Chang and Yijang Hsu and Hsaunming Kuo and Yinchieh Lai",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 25th Opto-Electronics and Communications Conference, OECC 2020 ; Conference date: 04-10-2020 Through 08-10-2020",
year = "2020",
month = oct,
day = "4",
doi = "10.1109/OECC48412.2020.9273715",
language = "English",
series = "25th Opto-Electronics and Communications Conference, OECC 2020",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "25th Opto-Electronics and Communications Conference, OECC 2020",
address = "United States",
}