Suboxide interface induced digital-to-analog switching transformation in all Ti-based memristor devices

Lung-Yu Chang, Firman Mangasa Simanjuntak, Chun-Ling Hsu, Sridhar Chandrasekaran, Tseung-Yuen Tseng

Research output: Contribution to journalArticlepeer-review

17 Scopus citations


Oxidation of TiN is a diffusion-limited process due to the high stability of the TiN metallic state at the TiN/TiO2 junction. Hence, the TiN/TiO2/TiN device being the inability to form a suitable interfacial layer results in the exhibition of abrupt current (conductance) rise and fall during the set (potentiation) and reset (depression) processes, respectively. Interfacial engineering by depositing Ti film served as the oxygen gettering material on top of the TiO2 layer induces a spontaneous reaction to form a TiOx interfacial layer (due to the low Gibbs free energy of suboxide formation). Such an interface layer acts as an oxygen reservoir that promotes gradual oxidation and reduction during the set and reset processes. Consequently, an excellent analog behavior having a 2-bit per cell and robust epoch training can be achieved. However, a thick interfacial layer may degrade the switching behavior of the device due to the high internal resistance. This work suggests that interfacial engineering could be considered in designing high-performance analog memristor devices.

Original languageEnglish
Article number073504
Number of pages5
JournalApplied Physics Letters
Issue number7
StatePublished - 17 Aug 2020




Dive into the research topics of 'Suboxide interface induced digital-to-analog switching transformation in all Ti-based memristor devices'. Together they form a unique fingerprint.

Cite this