Study on the effect of electron beam curing on low-K porous organosilicate glass (OSG) material

  • T. C. Chang*
  • , T. M. Tsai
  • , Po-Tsun Liu
  • , C. W. Chen
  • , Tseung-Yuen Tseng
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

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